Top Gate Engineering of Field-Effect Transistors Based on Wafer-Scale Two-Dimensional Semiconductors
Jingyi Ma,Xinyu Chen,Yaochen Sheng,Ling Tong,Xiaojiao Guo,Minxing Zhang,Chen Luo,Lingyi Zong,Yin Xia,Chuming Sheng,Yin Wang,Saifei Gou,Xinyu Wang,Xing Wu,Peng Zhou,David Wei Zhang,Chenjian Wu,Wenzhong Bao
DOI: https://doi.org/10.1016/j.jmst.2021.08.021
2021-01-01
Journal of Material Science and Technology
Abstract:The investigation of two-dimensional(2D)materials has advanced into practical device applications,such as cascaded logic stages.However,incompatible electrical properties and inappropriate logic levels re-main enormous challenges.In this work,a doping-free strategy is investigated by top gated(TG)MoS2 field-effect transistors(FETs)using various metal gates(Au,Cu,Ag,and Al).These metals with different work functions provide a convenient tuning knob for controlling threshold voltage(Vth)for MoS2 FETs.For instance,the Al electrode can create an extra electron doping(n-doping)behavior in the MoS2 TG-FETs due to a dipole effect at the gate-dielectric interface.In this work,by achieving matched electrical properties for the load transistor and the driver transistor in an inverter circuit,we successfully demon-strate wafer-scale MoS2 inverter arrays with an optimized inverter switching threshold voltage(VM)of 1.5 V and a DC voltage gain of 27 at a supply voltage(VDD)of 3 V.This work offers a novel scheme for the fabrication of fully integrated multistage logic circuits based on wafer-scale MoS2 film.