A Novel Approach for Doping Impurity in Thin Film in Situ by Dual-Beam Pulsed-Laser Deposition

CK Ong,SY Xu,WZ Zhou
DOI: https://doi.org/10.1063/1.1149168
IF: 1.6
1998-01-01
Review of Scientific Instruments
Abstract:Doping techniques are of great importance in developing new materials and devices. We present here a novel approach for doping impurity in thin film by using dual-beam pulsed-laser deposition technique that allows in situ controlling doping under a wide range of conditions. We demonstrated doping Ag in situ in YBa2Cu3O7−δ thin films and for the first time observed long bar-like Ag structures with a length up to 150 μm in the as-deposited films, which may have important application in the fabrication of superconductor-normal metal-superconductor Josephson junctions.
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