Influence of Si Contents on the Microstructure, Mechanical and Tribological Properties of Cr–Si–N Coatings

Lingling Huang,Changwei Zou,Wei Xie,Feng Peng,Lexi Shao

DOI: https://doi.org/10.1016/j.ceramint.2015.12.019

IF: 5.532

2015-01-01

Ceramics International

Abstract:Cr–Si–N coatings with different Si contents were deposited by a hybrid coating system, where the Cr target was used for the arc ion plating (AIP) and the Si target for the middle frequency (MF) magnetron sputtering. The XRD, cross-sectional SEM and XPS results indicated that the Cr–Si–N coating exhibited a nanocomposite structure containing CrN nanocrystallines and amorphous Si3N4 phase. Furthermore, the TEM results showed that all the CrN nano-crystals were embedded in an amorphous matrix of a-Si3N4. The thickness of the Cr–Si–N coatings was in the range of 2.1–2.4μm while the Si content was in the range of 2.2–11.1at%. The hardness of Cr–Si–N coatings first increased and then decreased with the increase of Si content and the highest value was approximately 2490Hv at 6.94at% Si content. For coatings with different Si content, the average friction coefficient was maintained around 0.35–0.45. The highest hardness of Cr–Si–N coatings with Si content of 6.94at% can be attributed to limited dislocation activity in nano-crystals and suppression of grain boundary sliding.