Performance Comparison Of Cross-Like Hall Plates With Different Covering Layers

Fei Lyu,Zhenyan Zhang,Eng-Huat Toh,Xinfu Liu,Yinjie Ding,Yifan Pan,Chengjie Li,Li Li,Jin Sha,Hongbing Pan
DOI: https://doi.org/10.3390/s150100672
IF: 3.9
2015-01-01
Sensors
Abstract:This paper studies the effects of the covering layers on the performance of a cross-like Hall plate. Three different structures of a cross-like Hall plate in various sizes are designed and analyzed. The Hall plate sensitivity and offset are characterized using a self-built measurement system. The effect of the P-type region over the active area on the current-related sensitivity is studied for different Hall plate designs. In addition, the correlation between the P-type covering layer and offset is analyzed. The best structure out of three designs is determined. Besides, a modified eight-resistor circuit model for the Hall plate is presented with improved accuracy by taking the offset into account.
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