Integrated silicon modulator based on microring array assisted MZI.

Xiangdong Li,Xue Feng,Kaiyu Cui,Fang Liu,Yidong Huang
DOI: https://doi.org/10.1364/OE.22.010550
IF: 3.8
2014-01-01
Optics Express
Abstract:A silicon modulator with microring array assisted MZI is experimentally demonstrated on silicon-on-insulator wafer through CMOS-compatible process. The footprint of the whole modulator is about 600 mu m(2). With forward-biased current-driven p-n junction, the 3-dB modulation bandwidth is similar to 2GHz. Furthermore, the impact of ambient temperature is minified with the help of MZI. Within temperature range of 10 -70 degrees C, the maximum divergence of modulation curve is less than similar to 3 dB. (C) 2014 Optical Society of America
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