Abstract:Integrated photonic circuits have transformed data communication, biosensing, and light detection and ranging, and hold wide-ranging potential for optical computing, optical imaging and signal processing. These applications often require tunable and reconfigurable photonic components, most commonly accomplished through the thermo-optic effect. However, the resulting tuning window is limited for standard optical materials such as silicon dioxide and silicon nitride. Most importantly, bidirectional thermal tuning on a single platform has not been realized. For the first time, we show that by tuning and optimizing the deposition conditions in inductively-coupled plasma chemical vapor deposition (ICPCVD) of silicon dioxide, this material can be used to deterministically tune the thermo-optic properties of optical devices without introducing significant losses. We demonstrate that we can deterministically integrate positive and negative wavelength shifts on a single chip, validated on amorphous silicon carbide (a-SiC), silicon nitride (SiN) and silicon-on-insulator (SOI) platforms. We observe up to a 10-fold improvement of the thermo-optic tunability and, in addition, demonstrate athermal ring resonators with shifts as low as 1.5 pm/°C. This enables the fabrication of a novel tunable coupled ring optical waveguide (CROW) requiring only a single heater. In addition, the low-temperature deposition of our silicon dioxide cladding can be combined with lift-off to isolate the optical devices resulting in a decrease in thermal crosstalk by at least two orders of magnitude. Our method paves the way for novel photonic architectures incorporating bidirectional thermo-optic tunability.

Thermo-optically Tunable Silicon Photonic Crystal Light Modulator

Electro-Optic Silicon Modulator With Horizontal Photonic Crystal Slot Slab

Tunable Optical Notch Filter Realized by Shifting the Photonic Bandgap in a Silicon Photonic Crystal Line-Defect Waveguide

Ultracompact Electrooptic Silicon Modulator With Horizontal Photonic Crystal Slotted Slab

Modeling and Characterization of Tunable Photonic Crystal Waveguides Based on Two-Dimensional Periodic Arrays of Silicon Pillars

Optically Tuneable Microwave-Photonic Phase Shifter Based on Silicon Microring Resonator

Fast Thermo-Optical Modulators with Doped-Silicon Heaters Operating at 2 Μm.

Thermooptic Switch Based on Photonic-Crystal Line-Defect Waveguides

Analysis of Electrooptic Modulator With 1-D Slotted Photonic Crystal Nanobeam Cavity

Chirped optical pulse compression using a silicon photonic crystal waveguide

High thermo-optic tunability in PECVD silicon-rich amorphous silicon carbide

Silicon Based Ultra-Compact Modulator with Photonic Crystal

Ultrahigh thermal-efficient all-optical silicon photonic crystal nanobeam cavity modulator with TPA-induced thermo-optic effect

Enhanced Electro-Optical Effect in Silicon

Single-resonance Silicon Nanobeam Filter with an Ultra-High Thermo-Optic Tuning Efficiency over a Wide Continuous Tuning Range.

Optically tunable topological photonic crystal

Suppression Ratio Tunable Microwave Photonic Filter Based on a Silicon Photonic Crystal Nanocavity

Ultra-compact and wide-spectrum-range thermo-optic switch based on silicon coupled photonic crystal microcavities

Magic silicon dioxide for widely tunable integrated photonics

Thermo-Optic Tunable Optical Filter Based on Fabry-Perot Microcavities in SOI

Efficient, Compact and Low Loss Thermo-Optic Phase Shifter in Silicon