Towards athermal slotted silicon microring resonators with UV-trimmable PMMA upper-cladding

Linjie Zhou,Okamoto, K.,Yoo, S.J.B.

DOI: https://doi.org/10.1364/cleo.2009.ctubb3

2009-01-01

Abstract:We demonstrate that PMMA upper cladding on the slotted silicon micoring resonators can reduce the resonance thermal dependence from 91 pm/deg to 27 pm/degC. UV trimming can shift the resonance wavelength 0.5 nm.

What problem does this paper attempt to address?

Athermalizing and Trimming of Slotted Silicon Microring Resonators with UV-Sensitive PMMA Upper-Cladding

Linjie Zhou,Katsunari Okamoto,S. J. B. Yoo

DOI: https://doi.org/10.1109/lpt.2009.2023522

IF: 2.6

2009-01-01

IEEE Photonics Technology Letters

Abstract:This letter experimentally demonstrates significant reduction in the resonance thermal sensitivity of the slotted silicon microring resonators by exploiting polymethyl methacrylate (PMMA) as upper-cladding. We investigate the resonance temperature dependence on the slot width with and without PMMA upper-cladding. The experimental results show that the temperature dependence is reduced from 91 pm/degC for a regular microring resonator to 27 pm/degC for the PMMA-clad slotted microring resonator. The ultraviolet (UV) sensitive PMMA upper-cladding also allows the resonance wavelengths of slotted microring resonators shift by 0.5 nm under UV light trimming. With the demonstrated schemes, each individual optical component can be athermalized and precisely registered to standard wavelengths for a future multiwavelength optically interconnected computing system-on-a-chip.
Tunable Silicon Reflection Cavity Mirror Based on Microring Resonator

Li Xia,Wang Chao,Yu Hui,Jiang Xiaoqing

DOI: https://doi.org/10.3788/aos201636.1223002

2016-01-01

Acta Optica Sinica

Abstract:Considering the requirement of monochromaticity and tunability for resonator used in on-chip optical interconnect source,we design and make a tunable silicon reflection cavity mirror based on microring resonator,using complementary metal-oxide-semiconductor technology and silicon material on insulating substrate.The performance of the reflection cavity is analyzed by the transfer-matrix method,and we find that the reflection cavity shows good properties in sharpness and extinction ratio.The experimental results show that the reflectivity of the reflection cavity can reach 90％ at the wavelength of 1549 nm,the quality factor is 3 × 104,and the free spectral range (FSR) is 9.6 nm.By applying the thermo-optic modulation to the microring resonator,the wavelength tunability in FSR can be realized within the power range of 0-40.5 mW.
Effect Of Host Polymer On Microfiber Resonator

Guillaume Vienne,Yuhang Li,Limin Tong

DOI: https://doi.org/10.1109/LPT.2007.903340

2007-01-01

Abstract:We observe that changing the surrounding material from air to a low refractive index polymer can considerably alter the transmission spectrum of a microfiber knot around a given wavelength. We report on a silica microfiber knot resonator about 180 pin in diameter. Using a supercontinumn source, we study its transmission when air and when a low index polymer are used as cladding. The resonator shows similar extinction ratio and Q-factor for both cladding materials. However, embedding the resonator in the polymer down-shifts the optimal operating wavelength by about 20%.
Compact microring resonators integrated with grating couplers working at 2 μm wavelength on silicon-on-insulator platform.

Zecen Zhang,Geok Ing Ng,Haodong Qiu,Wanjun Wang,Xin Guo,Mohamed S Rouifed,Chongyang Liu,Hong Wang

DOI: https://doi.org/10.1364/AO.56.005444

IF: 1.9

2017-01-01

Applied Optics

Abstract:Compact all-pass and add-drop microring resonators (radius=10 μm) integrated with grating couplers working at 2 μm wavelength are designed, fabricated, and characterized on a commercial 340-nm-thick-top-silicon silicon-on-insulator platform. They are suitable for high-volume integrated optical circuits at 2 μm wavelength as the fabrication process involved are uncomplicated and complementary metal-oxide-semiconductor (CMOS)-process compatible, thus making them more convenient to be utilized. The performance of the grating couplers, based on four most important parameters, has been simulated and optimized. The simulation and experimental results of grating couplers show the lowest coupling loss of 4.5 dB and 6.5 Db, respectively. By utilizing the grating couplers to couple light in and out from the chip, the designed microring resonators have been tested. The experimental results of microring resonators show that an extinction ratio of 12 dB and a quality factor of 11,200 can be achieved. To the best of our knowledge, this is thus far the smallest microring resonator ever demonstrated at this wavelength.
Athermal Silicon-on-insulator ring resonators by overlaying a polymer cladding on narrowed waveguides

Jie Teng,Pieter Dumon,Wim Bogaerts,Hongbo Zhang,Xigao Jian,Xiuyou Han,Mingshan Zhao,Geert Morthier,Roel Baets

DOI: https://doi.org/10.1364/oe.17.014627

2009-08-17

Abstract:Athermal silicon ring resonators are experimentally demonstrated by overlaying a polymer cladding on narrowed silicon wires. The ideal width to achieve athermal condition for the TE mode of 220 nm-height SOI waveguides is found to be around 350 nm. After overlaying a polymer layer, the wavelength temperature dependence of the silicon ring resonator is reduced to less than 5 pm/degrees C, almost eleven times less than that of normal silicon waveguides. The optical loss of a 350-nm bent waveguide (with a radius of 15 microm) is extracted from the ring transmission spectrum. The scattering loss is reduced to an acceptable level of about 50 dB/cm after overlaying a polymer cladding.
Athermal Silicon Ring Resonators Clad with Titanium Dioxide for 13µm Wavelength Operation

Shaoqi Feng,Kuanping Shang,Jock Bovington,Rui Wu,Binbin Guan,Kwang‐Ting Cheng,John E. Bowers,S. J. Ben Yoo

DOI: https://doi.org/10.1364/oe.23.025653

IF: 3.8

2015-01-01

Optics Express

Abstract:We investigate the athermal characteristics of silicon waveguides clad with TiO(2) designed for 1.3 µm wavelength operation. Using CMOS-compatible fabrication processes, we realize and experimentally demonstrate silicon photonic ring resonators with resonant wavelengths that vary by less than 6 pm/°C at 1.3 µm. The measured ring resonance wavelengths across the 20-50°C temperature range show nearly complete cancellation of the first-order thermo-optical effects and exhibit second-order thermo-optical effects expected from the combination of TiO(2) and Si.
Wide-range Tuning of Polymer Microring Resonators by the Photobleaching of CLD-1 Chromophores

JKS Poon,YY Huang,GT Paloczi,A Yariv

DOI: https://doi.org/10.1364/ol.29.002584

2004-01-01

Abstract:We present a simple and effective method for the postfabrication trimming of optical microresonators. We photobleach CLD-1 chromophores to tune the resonance wavelengths of polymer microring resonator optical notch filters. A maximum wavelength shift of -8.73 nm is observed. The resonators are fabricated with a soft-lithography molding technique and have an intrinsic Q value of 2.6 x 10(4) and a finesse of 9.3. The maximum extinction ratio of the resonator filters is -34 dB, indicating that the critical coupling condition has been satisfied.
Design of Athermal All-Polymer Waveguide Microring Resonator

韩秀友,张佳宁,金婷婷,王凌华,赵明山,王锦艳,蹇锡高

DOI: https://doi.org/10.1117/12.850677

2009-01-01

Abstract:The athermal all-polymer waveguide microring resonator is realized by selecting polymer substrate with proper thermal expansion coefficient to substitute the traditional silicon one. The designed results show that the maximal resonant wavelength shift is −0.0085nm when the temperature varies from 20°C to 65°C and the maximal wavelength shift slope is −0.0009nm/K.
Post-Fabrication Trimming of Silicon Photonic Ring Resonators at Wafer-Scale

Hasitha Jayatilleka,Harel Frish,Ranjeet Kumar,John Heck,Chaoxuan Ma,Meer Sakib,Duanni Huang,Haisheng Rong

DOI: https://doi.org/10.48550/arXiv.2203.03503

2022-03-04

Applied Physics

Abstract:Silicon ring resonator-based devices, such as modulators, detectors, filters, and switches, play important roles in integrated photonic circuits for optical communication, high-performance computing, and sensing applications. However, the high sensitivity to fabrication variations has limited their volume manufacturability and commercial adoption. Here, we report a low-cost post-fabrication trimming method to tune the resonance wavelength of a silicon ring resonator and correct for fabrication variations at wafer-scale. We use a Ge implant to create an index trimmable section in the ring resonator and an on-chip heater to apply a precise and localized thermal annealing to tune and set its resonance to a desired wavelength. We demonstrate resonance wavelength trimming of ring resonators fabricated across a 300 mm silicon-on-insulator (SOI) wafer to within +/-32 pm of a target wavelength of 1310 nm, providing a viable path to high-volume manufacturing and opening up new practical applications for these devices.
Post-Processing Trimming of Silicon Photonic Devices Using Femtosecond Laser.

Yating Wu,Hongpeng Shang,Xiaorui Zheng,Tao Chu

DOI: https://doi.org/10.3390/nano13061031

IF: 5.3

2023-01-01

Nanomaterials

Abstract:Fabrication errors inevitably occur in device manufacturing owing to the limited processing accuracy of commercial silicon photonic processes. For silicon photonic devices, which are mostly processing-sensitive, their performances usually deteriorate significantly. This remains an unsolved issue for mass production, particularly for passive devices, because they cannot be adjusted once fixed in processes. This study presents a post-processing trimming method to compensate for fabrication errors by changing the cladding equivalent refractive indices of devices with femtosecond lasers. The experimental results show that the resonant wavelengths of micro-ring resonators can be regularly shifted within their free spectral range via tuning the illuminating area, focusing position, emitting power, and scanning speed of the trimming femtosecond laser with an acceptable loss increase. These experiments, as well as the trimming experiments in improving the phase balance of Mach-Zehnder interferometer switches, indicate that the femtosecond laser trimming method is an effective and fast method for silicon photonic devices.
Athermal Scheme Based on Resonance Splitting for Silicon-on-insulator Microring Resonators

Qingzhong Deng,Xinbai Li,Zhiping Zhou,Huaxiang Yi

DOI: https://doi.org/10.1364/prj.2.000071

IF: 7.6

2014-01-01

Photonics Research

Abstract:A novel athermal scheme utilizing resonance splitting of a dual-ring structure is proposed. Detailed design and simulation are presented, and a proof of concept structure is optimized to demonstrate an athermal resonator with resonance wavelength variation lower than 5 pm/K within 30 K temperature range. (C) 2014 Chinese Laser Press
Athermal silicon ring resonators clad with titanium dioxide for 1.3 mu m wavelength operation

Shaoqi Feng,Kuanping Shang,Jock T. Bovington,Rui Wu,Binbin Guan,Kwang-Ting Cheng,John E. Bowers,S. J. Ben Yoo

DOI: https://doi.org/10.1364/OE.23.025653

IF: 3.8

2015-01-01

Optics Express

Abstract:We investigate the athermal characteristics of silicon waveguides clad with TiO2 designed for 1.3 mu m wavelength operation. Using CMOS-compatible fabrication processes, we realize and experimentally demonstrate silicon photonic ring resonators with resonant wavelengths that vary by less than 6 pm/degrees C at 1.3 mu m. The measured ring resonance wavelengths across the 20-50 degrees C temperature range show nearly complete cancellation of the first-order thermo-optical effects and exhibit second-order thermo-optical effects expected from the combination of TiO2 and Si. (C) 2015 Optical Society of America
Slope Tunable Fano Resonances in Asymmetric Embedded Microring Resonators

Gencheng Wang,Tingge Dai,Jianfei Jiang,Hui Yu,Yinlei Hao,Yuehai Wang,Yubo Li,Xiaoqing Jiang,Jianyi Yang

DOI: https://doi.org/10.1088/2040-8986/aa51a1

IF: 2.1

2017-01-01

Journal of Optics

Abstract:An asymmetric embedded microring resonant system is proposed and fabricated on a silicon-on-insulator (SOI) to achieve slope tunable Fano resonances. The Fano resonances originate from the nonlinear phase shift produced by adding an inner ring coupling with the outer ring. The slope of the Fano resonance can be well tuned to be ultra-high by controlling the microheaters to adjust the phase condition. Experimentally, we observe Fano resonance with a maximum extinction ratio of about 40 dB, and the slope can be tuned from -35 dB nm(-1) to -93 dB nm(-1), which shows good agreement with the theoretical analysis. This device could find potential applications in ultra-high sensitivity sensing systems.
Compensation of Thermal Refraction Effect in High-Q Toroidal Microresonator by Polydimethylsiloxane Coating

L. He,Y-F. Xiao,C. Dong,J. Zhu,V. Gaddam,L. Yang

DOI: https://doi.org/10.1063/1.3030986

IF: 4

2008-01-01

Applied Physics Letters

Abstract:We experimentally and theoretically characterize the thermal refraction effect in a silica microtoroid and demonstrate that such effect can be reduced or even eliminated by applying a thin layer of polydimethylsiloxane (PDMS) to the surface of the silica resonator. By increasing the coating thickness, the whispering gallery modes (WGMs) experience a transition from redshift to blueshift induced by thermal absorption. Experiment results demonstrate that at the thickness of 0.52 μm, the fundamental WGM with observed Q factor of 1.5×106 shows no shift with the input optical power since the thermal refraction of the silica for this mode is compensated completely by the PDMS layer, which has an opposite thermal refraction effect. This work shows that the PDMS layer could be used to reduce thermal noise in high-Q silica microcavities for applications in sensing, lasing, and nonlinear optics.
Integrated High-Performance Two-Stage Ratiometric Wavelength Monitors on Silicon

Gencheng Wang,Tingge Dai,Weiwei Chen,Yuehai Wang,Yubo Li,Xiaoqing Jiang,Jianyi Yang

DOI: https://doi.org/10.1109/lpt.2017.2686403

IF: 2.6

2017-01-01

IEEE Photonics Technology Letters

Abstract:We design and fabricate an integrated high-performance two-stage ratiometric wavelength monitors (RMWMs) on silicon. The first stage is a coarse wavelength monitor with a wide working range based on two unbalanced Mach-Zehnder interferometers acting as edge filters. The second stage is a fine wavelength monitor with picometer wavelength resolution utilizing two tunable microrings acting as edgefilters. The highest measured wavelength resolution can reach 1.6 pm in a 0.7-nm-wide wavelength range for the fine wavelength monitor. The working wavelength range can reach about 55 nm with a resolution of 0.1 nm for the coarse wavelength monitor. By thermally tuning the resonant wavelengths of microrings, we can obtain high resolution on the whole 9.6-nm free spectral range of the microrings. The influence of perturbation of temperature is also discussed. This letter can solve the problem that the measurable wavelength range and resolution limit each other in a conventional RMWM.
Characterization of Ultra-High-Q Si3N4 Micro-Ring Resonators with High-Precision Temperature Control

Paul Kaufmann,Xingchen Ji,Kevin Luke,Michal Lipson,Sven Ramelow

DOI: https://doi.org/10.1364/cleo_at.2018.jtu2a.72

2018-01-01

Abstract:We observe ultra-high Q-factors in Si3N4 micro-ring resonators exceeding 2 × 106 at 850 nm. We characterize them with a novel method harnessing high-precision temperature scanning and determine their thermal tuning coefficient with an uncertainty of only 4 MHz/K.
Athermal high-Q tantalum-pentoxide-based microresonators on silicon substrates

Tzyy-Jiann Wang,Po-Kuang Chen,Yan-Ting Li,An-Ni Sung

DOI: https://doi.org/10.1016/j.optlastec.2021.106925

2021-06-01

Abstract:Integrated microresonators with low thermal drift of resonant wavelength are imperative photonic devices to provide stable multiplexing/filtering functions on silicon substrates with large thermo-optic coefficient. To realize athermal microresonators with high quality factor and small footprint, we present an undercut Ta2O5-based microdisk resonator on the Si substrate using a facile lift-off process on the sputtered film and chemical etching. Dependences of surface morphology, crystalline property, refractive index and extinction coefficient of Ta2O5 film on the annealing temperature are studied to reveal favorable parameters for the microresonator production. The produced 40 μm-diameter Ta2O5 microdisk resonator exhibits low thermal drift (7.40 pm/°C), high quality factor (1.65 × 104) and wide free spectral range (11.5 nm). The measured thermo-optic coefficient at the wavelength 1550 nm is 3.0 × 10−6/°C. The thermal stability is further enhanced by using the TiO2 film with the negative thermo-optic coefficient. The study of Ta2O5/TiO2 composite microdisk resonators achieves high thermal stability as best as 0.26 pm/°C.

optics,physics, applied
Towards Athermal Optically-Interconnected Computing System Using Slotted Silicon Microring Resonators and RF-photonic Comb Generation

Linjie Zhou,Ken Kashiwagi,Katsunari Okamoto,R. P. Scott,N. K. Fontaine,Dan Ding,Venkatesh Akella,S. J. B. Yoo

DOI: https://doi.org/10.1007/s00339-009-5120-7

2009-01-01

Applied Physics A

Abstract:We report that completely athermal design of a slotted silicon waveguide is possible by combining the negative thermo-optic (TO) coefficient of, for example, polymethyl methacrylate (PMMA) with the positive TO coefficient of silicon. When used in a microring resonator structure, the filled overcladding slotted waveguide and the unfilled (air-filled) overcladding slotted waveguide can both achieve athermal characteristics. Simulations indicate a wide range of realizations with proper design parameters of the slotted waveguides, namely, the silicon strip and slot widths. Preliminary experimental results on fabricated devices demonstrate that the temperature dependence is reduced from 91 pm/°C for a regular microring resonator to 52 pm/°C for the PMMA-clad microring resonator. Completely athermal realization is expectable in similar devices with improved fabrication techniques. For the external optical source, we demonstrate a stable 3.5 THz wide (175 modes×20 GHz) optical comb source with nearly flat spectral phase. Adjustable mode spacing and wavelength tunability across the C-band are maintained so that comb lines can be matched to the specified wavelength grid of the computing system. With such schemes, temperature controls of individual optical components in the optically interconnected computing chips become unnecessary, greatly reducing the complexity of the computing system.
Integrated Buried Heaters for Efficient Spectral Control of Air-Clad Microresonator Frequency Combs

Gregory Moille,Daron Westly,Edgar F. Perez,Meredith Metzler,Gregory Simelgor,Kartik Srinivasan

DOI: https://doi.org/10.1063/5.0127466

2022-10-05

Abstract:Integrated heaters are a basic ingredient within the photonics toolbox, in particular for microresonator frequency tuning through the thermo-refractive effect. Resonators that are fully embedded in a solid cladding (typically SiO\textsubscript{2}) allow for straightforward lossless integration of heater elements. However, air-clad resonators, which are of great interest for short wavelength dispersion engineering and direct interfacing with atomic/molecular systems, do not usually have similarly low loss and efficient integrated heater integration through standard fabrication. Here, we develop a new approach in which the integrated heater is embedded in SiO$_2$ below the waveguiding layer, enabling more efficient heating and more arbitrary routing of the heater traces than possible in a lateral configuration. We incorporate these buried heaters within a stoichiometric Si$_3$N$_4$ process flow that includes high-temperature ($>$1000~$^\circ$C) annealing. Microring resonators with a 1~THz free spectral range and quality factors near 10$^6$ are demonstrated, and the resonant modes are tuned by nearly 1.5~THz, a 5$\times$ improvement compared to equivalent devices with lateral heaters\greg{.} Finally, we demonstrate broadband dissipative Kerr soliton generation in this platform, and show how the heaters can be utilized to aid in bringing relevant lock frequencies within a detectable range.

Optics,Applied Physics
High-reflectivity, high-Q micromechanical membranes via guided resonances for enhanced optomechanical coupling

Catvu H. Bui,Jiangjun Zheng,S. W. Hoch,Lennon Y. T. Lee,J. G. E. Harris,Chee Wei Wong

DOI: https://doi.org/10.1063/1.3658731

2011-10-17

Abstract:Using Fano-type guided resonances (GRs) in photonic crystal (PhC) slab structures, we numerically and experimentally demonstrate optical reflectivity enhancement of high-Q SiNx membrane-type resonators used in membrane-in-the-middle optomechanical (OM) systems. Normal-incidence transmission and mechanical ringdown measurements of 50-nm-thick PhC membranes demonstrate GRs near 1064 nm, leading to a ~ 4\times increase in reflectivity while preserving high mechanical Q factors of up to ~ 5 \times 10^6. The results would allow improvement of membrane-in-the-middle OM systems by virtue of increased OM coupling, presenting a path towards ground state cooling of such a membrane and observations of related quantum effects.

Optics,Quantum Physics

Towards athermal slotted silicon microring resonators with UV-trimmable PMMA upper-cladding

Athermalizing and Trimming of Slotted Silicon Microring Resonators with UV-Sensitive PMMA Upper-Cladding

Tunable Silicon Reflection Cavity Mirror Based on Microring Resonator

Effect Of Host Polymer On Microfiber Resonator

Compact microring resonators integrated with grating couplers working at 2 μm wavelength on silicon-on-insulator platform.

Athermal Silicon-on-insulator ring resonators by overlaying a polymer cladding on narrowed waveguides

Athermal Silicon Ring Resonators Clad with Titanium Dioxide for 13µm Wavelength Operation

Wide-range Tuning of Polymer Microring Resonators by the Photobleaching of CLD-1 Chromophores

Design of Athermal All-Polymer Waveguide Microring Resonator

Post-Fabrication Trimming of Silicon Photonic Ring Resonators at Wafer-Scale

Post-Processing Trimming of Silicon Photonic Devices Using Femtosecond Laser.

Athermal Scheme Based on Resonance Splitting for Silicon-on-insulator Microring Resonators

Athermal silicon ring resonators clad with titanium dioxide for 1.3 mu m wavelength operation

Slope Tunable Fano Resonances in Asymmetric Embedded Microring Resonators

Compensation of Thermal Refraction Effect in High-Q Toroidal Microresonator by Polydimethylsiloxane Coating

Integrated High-Performance Two-Stage Ratiometric Wavelength Monitors on Silicon

Characterization of Ultra-High-Q Si3N4 Micro-Ring Resonators with High-Precision Temperature Control

Athermal high-Q tantalum-pentoxide-based microresonators on silicon substrates

Towards Athermal Optically-Interconnected Computing System Using Slotted Silicon Microring Resonators and RF-photonic Comb Generation

Integrated Buried Heaters for Efficient Spectral Control of Air-Clad Microresonator Frequency Combs

High-reflectivity, high-Q micromechanical membranes via guided resonances for enhanced optomechanical coupling