Abstract:A high-sensitivity temperature sensor is demonstrated by coating a layer of polydimethylsiloxane (PDMS) on the surface of a silica toroidal microresonator on a silicon chip. Combining both the advantages of the WGM microcavity (with ultrahigh Q factor) and PDMS (with large thermal effect), the PDMS-coated microresonator is highly sensitive to the temperature change of the surroundings. We find that, when the PDMS layer becomes thicker, the fundamental WGM experiences a transition from red- to blue-shift with temperature increasing due to the negative thermal-optic coefficient of PDMS. The measured sensitivity (0.151 nm/K) is one order of magnitude higher than pure silica microcavity sensors. The ultra-high resolution of the temperature sensor is also analyzed to reach 10-4 K. With both high sensitivity and resolution, the thermal sensor can be employed to monitor a slight temperature variation which cannot be realized with conventional temperature sensor. Its on-chip feature can also fulfill the demand for integration and miniaturization in optics.

Compensation of Thermal Refraction Effect in High-Q Toroidal Microresonator by Polydimethylsiloxane Coating

Effect Of Host Polymer On Microfiber Resonator

Oscillatory Thermal Dynamics in High-Q PDMS-coated Silica Toroidal Microresonators.

Electromagnetically induced transparency-like effect in a single polydimethylsiloxane-coated silica microtoroid

On Chip, High-Sensitivity Thermal Sensor Based On High-Q Polydimethylsiloxane-Coated Microresonator

Fabrication of High-Q Polydimethylsiloxane Optical Microspheres for Thermal Sensing

High-sensitivity Temperature Sensing by Employing an On-Chip High-Q PDMS-coated Toroidal Microcavity

Compensation of the Thermal Effect in a Mounted Microbubble Resonator

High-Q Whispering Gallery Modes in a Polymer Microresonator with Broad Strain Tuning

Quantum electrodynamics in a whispering-gallery microcavity coated with a polymer nanolayer

High-Q whispering gallery mode directly on a silicon substrate

High Finesse Silica Waveguide Ring Resonators for Resonant Micro-Optic Gyroscopes

Thermal Stress Analysis of the Microtoroid under CO2 Laser

Optical Resonances in Tubular Microcavities with Subwavelength Wall Thicknesses

Thermal oscillatory behavior analysis and dynamic modulation of refractive index in microspherical resonator

Analysis of High-Q Optical Microtoroid Cavity by CO2 Laser

High-reflectivity, high-Q micromechanical membranes via guided resonances for enhanced optomechanical coupling

Light Confinement in A Low-Refraction-Index Microcavity Bonded on A Silicon Substrate

Waveguide-loaded silica fibers for coupling to high-index micro-resonators

Optothermal Control of the Raman Gain Enhanced Ringing in Microresonators

Internally-tuning whispering-gallery modes in a high-Q conical microresonator for electromagnetically induced transparency-like effect