Abstract:Searching for the relationship between the nanostructure and optical properties has always been exciting the researchers in the field of optics (linear optics as well as non-linear optics), energy harvesting (anti-reflective Si solar cells, perovskite solar cells, ..., etc.), and industry (anti-reflection coating on car windows, sunglasses, etc.). In this work, we present an approach for nanostructuring the silicon substrate to silicon photonic crystals. By precisely controlling the etching time and etching path after using nanoimprint lithography, ordered arrays of inverted Si nanopyramids and Si nanopillars with good homogeneity, uniform surface roughness, high reproducibility of pattern transfer, and a controllable aspect ratio are prepared. Experimental investigation of the optical properties indicates that the reflections of these Si nanostructures are mainly determined by the aspect ratio as well as the period of nanostructures. Furthermore, we have experimentally observed visible-light scattering (V-LS) patterns on inverted Si nanopyramids and Si nanopillars, and their corresponding patterns can be precisely controlled by the patterned nanostructures. The V-LS pattern, background, and "ghost peaks" on the angle-resolved scattering results are caused by constructive interference, destructive interference, and the interference situation between both. This controllable nanopatterning on crystalline Si substrates with precisely tunable optical properties shows great potential for applications in many fields, for example, optics, electronics, and energy.

Two-Dimensional Photonic Crystal Patterns For Vertical Light Extraction Enhancement From Ultra-Thin Amorphous Si/Si(3)N(4) Multilayer Stack

Enhanced Vertical Light Extraction from Ultrathin Amorphous Si–Si$_{3}$N$_{4}$ Multilayers with Photonic Crystal Patterns

Strong Vertical Light Output From Thin Silicon Rich Oxide/Sio2 Multilayers Via In-Plane Modulation Of Photonic Crystal Patterns

Enhancement of the Monolayer Tungsten Disulfide Exciton Photoluminescence with a Two-Dimensional Material/Air/Gallium Phosphide In-Plane Microcavity.

PHOTONIC CRYSTALS & METAMATERIAL FILTERS BASED ON 2D ARRAYS OF SILICON NANOPILLARS

High Transmitting and Coupling Characteristics of Light at the Surface of A Photonic Crystal with A Triangular Lattice of Air Holes

High-Q and High-Order Side-Coupled Air-Mode Nanobeam Photonic Crystal Cavities in Silicon

Modeling and Characterization of Tunable Photonic Crystal Waveguides Based on Two-Dimensional Periodic Arrays of Silicon Pillars

Ultra High Luminous Efficiency P-Type Surface Defect Structure GaN LED

Photoluminescence of nc-Si/SiN superlattices embedded in optical microcavities

Progress in thin-film silicon solar cells based on photonic-crystal structures

Layer‐by‐Layer Approach to (2+1)D Photonic Crystal Superlattice with Enhanced Crystalline Integrity

Enhancement of the Monolayer WS2 Exciton Photoluminescence with a 2D-Material/Air/GaP In-Plane Microcavity

Experimental Demonstration of Quasi-Resonant Absorption in Silicon Thin Films for Enhanced Solar Light Trapping

Silicon-based one-dimensional photonic crystal microcavity

Surface Plasmon-Enhanced Micro-Cylinder Mode in Photonic Quasi-Crystal.

Research on Light trapping of Three-dimensional Photonic Crystal Glass Substrate Used in Amorphous Silicon Thin Film Solar Cells

Modified Photoluminescence by Silicon-Based One-Dimensional Photonic Crystal Microcavities

Tailoring Patterned Visible-Light Scattering by Silicon Photonic Crystals

Self-assembling of Submicrometer Three-Dimensional Photonic Crystals in Concave Microzones Etched on Silicon Substrates

The Structural and Optical Properties of nc-Si/SiO2 Multilayers