Concrete the aligned CNT-films

Huai-Yuan Chu,Tso-Chi Chang,Hsu, Wen-Kuang,Weileun Fang
DOI: https://doi.org/10.1109/SENSOR.2005.1496554
2005-01-01
Abstract:This study has demonstrated the idea of concreting aligned CNT-films using a chemical vapor deposited (CVD) polymer film, so as to form a "CNT-polymer" composite-film. The mechanical properties of the aligned CNT-film and the "CNT-polymer" composite-film are characterized. The experimental results show that the elastic modulus and hardness of the composite-film are much greater than those of the aligned CNT-films. This study also established a process to fabricate suspended MEMS structures using this composite-film. Thus the "CNT-polymer" composite-film could be a potential material for MEMS.
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