The Effect Of Thermal-Treatment On The Electrical-Properties Of Mbe-Alinas

Jk Luo,H Thomas,Sa Clark,Rh Williams
DOI: https://doi.org/10.1109/ICIPRM.1994.328245
1994-01-01
Abstract:The effect of thermal treatment on the electrical properties of Al 0.48In0.52As/InP materials grown by molecular beam epitaxy (MBE) has been investigated using Schottky barrier structures. It was found that the intrinsic defects incorporated in MBE-AlInAs layers cause an excess tunnelling current at forward and reverse bias, and are responsible for the low barrier height of Schottky diodes. Thermal annealing at TA>500°C annihilates the major defects in the AlInAs layer, which results in a reduction of the excess tunnelling current and enhancement of the barrier height. These results therefore, demonstrate a method to overcome the shortcomings introduced by defects and to improve the electrical properties of MBE-AlInAs materials
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