Abstract:A high sensitivity quartz resonant pressure sensor with differential output and self-correction is proposed. Although compared to other resonant devices, quartz resonators have less influence on external environmental factors due to their own high quality factor Q; the influence of external environment such as temperature, vibration, and humidity cannot be ignored in high-precision applications. These errors need to be eliminated or compensated. Therefore, this paper divides the core unit of the sensor into two parts: the working unit and the reference unit. The working unit provides the differential outputs which not only improves the sensitivity but also suppresses some interference such as time drift and temperature drift, and it is rarely used in quartz resonant pressure sensors. The reference unit can effectively detect and offset the interference of temperature and vibration which is named as self-correction, and it can also provide temperature measurement. Double-ended tuning fork quartz resonators used in both units are manufactured by micromachining technology. Bellows and flexible mechanisms used as pressure conversion units are manufactured using modern mechanical technology. The test results show that the sensor has the conformity accuracy of the fitting formula of 0.0148% full scale (FS), the good basic accuracy of 0.06% FS, and the high sensitivity of 36.58 Hz/kPa which meets well with the theoretical result. It is shown by the experiments that the reference unit can effectively correct the interference of temperature and vibration. The theoretical analysis and experimental results prove the feasibility of the resonant pressure sensor which can meet the application requirements of pressure measurement in the high-tech industries.

A Low-Noise CMOS Interface Circuit for Resonant Pressure Sensor

Studies of a high-sensitive surface acoustic wave sensor for passive wireless blood pressure measurement

High Sensitivity Photoelectric Pressure Sensor Based on A Monolithic Dual Photodiode

A low-noise switched-capacitor interface for a capacitive micro-accelerometer

A Resonant Low-Pressure Microsensor With Low Temperature Disturbance

A High-sensitivity, Small-size Resonant Pressure Microsensor Based on Optimized Resonator-diaphragm Structure.

Resonant MEMS Pressure Sensor in 180 nm CMOS Technology Obtained by BEOL Isotropic Etching

A Lateral Differential Resonant Pressure Microsensor Based on SOI-Glass Wafer-Level Vacuum Packaging

A Sub-µg Bias-Instability MEMS Oscillating Accelerometer with an Ultra-Low-Noise Read-Out Circuit in CMOS

A Low-Noise Low-Offset CMOS Readout Circuit for MEMS Capacitive Accelerometers

A Micromachined Resonant Micro-Pressure Sensor

A Micromachined Resonant Low-Pressure Sensor With High Quality Factor

A Resistive Sensor Interface IC with Inductively Coupled Wireless Energy Harvesting and Data Telemetry for Implantable Pressure Sensing.

An Ultra-Low Frequency and Low-Pressure Capacitive Blood Pressure Sensor Based on Micro-Mechanical Resonator

A low-noise fully-differential open-loop interface for high-G capacitive micro-accelerometers with 112.2 dB dynamic range

A MEMS Resonant Differential Pressure Sensor With High Accuracy by Integrated Temperature Sensor and Static Pressure Sensor

High Accuracy Resonant Pressure Sensor With Balanced-Mass DETF Resonator and Twinborn Diaphragms

A high sensitivity quartz resonant pressure sensor with differential output and self-correction.

A Low-Noise HV Interface Circuit for MEMS Vibratory Gyroscope

A nano-opto-mechanical pressure sensor via ring resonator.