Fabrication of Spiral-Shaped PVDF Cantilever Based Vibration Energy Harvester

Wen Liu,Mengdi Han,Xuming Sun,Haixia Zhang
DOI: https://doi.org/10.1109/nems.2014.6908849
2014-01-01
Abstract:Polyvinylidene fluoride (PVDF) has a strong piezoelectricity. With the piezoelectric coefficient of poled thin films as large as 6-7 pC/N, PVDF is becoming a popular material for the sensors and energy harvesting. However, the fabrication process of PVDF is a big challenge due to the physical and chemical properties of PVDF. In this paper, a spiral-shaped PVDF cantilever is fabricated to harvest vibration energy in the environment. Copper mass and silicon mass are added to the PVDF cantilever to reduce the resonant frequency. Series of MEMS fabrication process are utilized to realize the PVDF piezoelectric energy harvester.
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