An Interventional Microfabrication Process for Integration of Commercial Piezoelectric Films and Micro Structures for Ultra-Low Frequency Energy Harvesting

Haizhao Feng,Ling Bu,Sixing Xu,Xiaohong Wang
DOI: https://doi.org/10.1109/mems58180.2024.10439434
2024-01-01
Abstract:Integrating piezoelectric films on flexible micro energy harvesters (MEHs) significantly improves energy harvesting performance under low-frequency environmental vibrations. This paper presents a novel interventional method for integrating commercial piezoelectric films and microstructures for ultra-low frequency energy harvesting with high compatibility and low cost. This microfabrication process is featured by polydimethylsiloxane (PDMS) oxygen plasma bonding using an auxiliary-guiding wafer. The MEH integrated with commercial flexible piezoelectric films shows a prominent ultra-low-frequency performance, achieving a normalized power density (NPD) of 13.33 mu W/cm(3)/g(2) around 2 Hz. These results provide a new strategy for achieving integrated flexible piezoelectric MEH.
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