Film bulk acoustic resonators with 400 MHz ultrawide-range tunability using crystalline PZT thin film
Xinyu Cai,Kaihang Zhang,Jianhui Wu,Jie Li,Hao Jin,Shurong Dong,Jinkai Chen,Weipeng Xuan,Jikui Luo
DOI: https://doi.org/10.1016/j.mssp.2023.107817
IF: 4.1
2023-11-01
Materials Science in Semiconductor Processing
Abstract:Tunable and switchable film bulk acoustic resonators (FBARs) have great application potential owing to their much-increased flexibility in radiofrequency (RF) circuits. Here, we report on the design and fabrication of a tunable and switchable FBAR based on a thin crystalline lead zirconate titanate (PZT, Pb[Zr0.6Ti0.4]O3) film. The FBAR device has a resonant frequency of 2.42 GHz with a high effective electromechanical coupling coefficient k eff 2 of 30%. The frequency tunable range of the device is up to 400 MHz (2.11–2.51 GHz, 16.6%) with a DC bias voltage of less than 12 V, and the device can also be switched off when the polarization intensity in the PZT film is zero. Through the investigation, a relationship between the ferroelectric nature of PZT material and the wide tuning range of FBAR is established, providing a theoretical and experimental guideline for further development.
engineering, electrical & electronic,materials science, multidisciplinary,physics, condensed matter, applied