Abstract:This paper describes the coaxial integration of a Michelson interferometer (MI) and a Sagnac interferometer (SI) in a high-speed, phase-sensitive laser probe for surface acoustic wave/bulk acoustic wave devices. This combination enables the MI to be used for calibration of the vibration amplitude captured by the SI without sacrificing the measurement accuracy and speed of the SI-based laser probe. First, the system setup is detailed. Next, simultaneous measurement is performed using the SI and MI, and good coincidence is demonstrated between these measured results after correction of tiny misalignment between two optical axes. This means that the calibration can be performed simply by multiplying the data captured by SI by a coefficient of proportionality; this value of this can be determined by comparison with the data captured by simultaneous measurement for a tiny area. Finally, the procedure for absolute vibration amplitude measurement is proposed and its validity is confirmed by actual measurement.

Laser Probe System for 5 GHz SAW/BAW Devices

A Laser Probe Based on a Sagnac Interferometer with Fast Mechanical Scan for RF Surface and Bulk Acoustic Wave Devices

Phase-Sensitive And Fast-Scanning Laser Probe System For Rf Saw/Baw Devices

Phase-sensitive and fast-scanning laser probe system for radio frequency surface/bulk acoustic wave devices

Improvement of Detection System for a Fast-Scanning and Phase-Sensitive Laser Probe for Surface Acoustic Wave Devices in 2 GHz Range

Implementation of Frequency Scanning Function in Phase Sensitive Laser Probe System for RF SAW/BAW Devices

Development of Fast-Scanning Laser Probe System Based on Knife-Edge Method for Diagnosis of Rf Surface Acoustic Wave Devices

Implementation of Auto-focus Function to Laser Probe for RF Acoustic Wave Devices for Its Long Time Continuous Operation

High-Speed Laser Probing System for Surface Acoustic Wave Devices Based on Knife-Edge Method

Focus adjustment system for a fast-scanning and phase-sensitive laser probe for radio frequency surface and bulk acoustic wave devices

Phase-Sensitive And Fast-Scanning Laser Probe System For Diagnosis Of High Frequency Acoustic Wave Devices

A Multiple-Scan Focusing Method for RF BAW Device Observation by Laser Probe System

A Multiple-Scan Focusing Method for Radio Frequency Bulk Acoustic Wave Device Observation by Laser Probe System

Focus Adjustment System of Laser Probe for Radio Frequency Surface and Bulk Acoustic Wave Devices

Development of a High-Speed, Phase-Sensitive Laser Probe System for RF Surface Acoustic Wave/bulk Acoustic Wave Devices with an Absolute Vibration Amplitude Measurement Function

Study of AFM-based probe for detecting laser induced surface acoustic wave

Integrated Software for Image Processing in RF SAW/BAW Laser Probe System

Vibration Compensating Beam Scanning Interferometer for Surface Measurement

Development of a High-Speed, Phase-Sensitive Laser Probe System for RF Surface/bulk Acoustic Wave Devices with an Autofocus Function for Long-Time Continuous Operation

Study on the Frequency Dependence of Lateral Energy Leakage in Rf Baw Device by Fast-Scanning Laser Probe System

Observational and Theoretical Validation of Longitudinal Type Surface Acoustic Wave Devices