Abstract:This article presents an adaptive zoom-capacitance-to-digital converter (CDC)-based CMOS humidity sensor. The humidity sensor is realized by means of two differential capacitors whose dielectrics are sensitive to humidity. The sensing capacitors are interfaced with a zoom CDC, which consists of a successive-approximation- register (SAR) analog-to-digital converter (ADC) and a 3rd-order delta-sigma modulator (Delta Sigma M). The SAR ADC eliminates the influence of the baseline capacitance to reduce the input range of the Delta Sigma M. To improve the energy efficiency of the CDC across the full input range, a power-aware floating inverter amplifier (FIA) array is proposed, which is configured based on the conversion results of the SAR logic. In addition, an adaptive range-shift (ARS) zoom CDC is proposed to: 1) resist off-chip parasitics and interference and 2) allow low redundancy and a more energy-efficient FIA-based comparator, thus reducing power consumption. The proposed CMOS humidity sensor is implemented in a 0.11-mu m CMOS process. Measurement results show a capacitance resolution of 17.9 aF and an effective number of bits (ENOB) of 14.0 within a conversion time of 1.01 ms. The proposed humidity sensor consumes 1.5 mu W of power and exhibits a 0.0094 % relative humidity (RH) resolution and a +/- 1.5 %RH peak-to-peak accuracy (3 sigma error of 5.5 %RH) among 12 chips from 20 to 85 % RH, and it achieves a figure of merit (FoM) of 0.135 pJ.%RH2, which is more than six times better than the state of the art.

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