Relative position and attitude test method for optical elements utilizing LVDT

Ma Li,Ouyang Hangkong,Rong Weibin,He Zhengfeng,Sun Lining
DOI: https://doi.org/10.19650/j.cnki.cjsi.2011.10.025
2011-01-01
Abstract:A linear variable differential transformer (LVDT) is presented, which can measure 3 degree-of-freedom (DOF) position and attitude relations between a spherical mirror and a resonator in an optical assembly process. Four symmetrically distributed LVDT sensors are utilized to realize the position and attitude measurement. Position and attitude relations of the two optical elements are deduced according to the readings of the four LVDT sensors. A position and attitude test circuit is designed, which uses an integrated signal conditioning chip AD598. The design achieves a resolution of 0.1 μm and repeatability of ±0.3 μm. And the LVDT sensors can track sine wave signal and square wave signal well. A PID algorithm improves the efficiency of the optical assembly. Experimental results show that the test method can accomplish position and attitude adjustment in 25 seconds when the processing and installation error of the spherical mirror is controlled in an allowable range. The maximum distance error is 0.5μm and maximum angle error is 8", which verify the feasibility of the proposed method.
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