Fabrication of a polymer micro needle array by mask-dragging X-ray lithography and alignment X-ray lithography

Yigui Li,Chunsheng Yang,Jingquan Liu,Susumu Sugiyama
DOI: https://doi.org/10.1088/0256-307X/28/3/038101
2011-01-01
Chinese Physics Letters
Abstract:Polymer materials such as transparent thermoplastic poly(methyl methacrylate) (PMMA) have been of great interest in the research and development of integrated circuits and micro-electromechanical systems due to their relatively low cost and easy process. We fabricated PMMA-based polymer hollow microneedle arrays by mask-dragging and aligning x-ray lithography. Techniques for 3D micromachining by direct lithography using x-rays are developed. These techniques are based on using image projection in which the x-ray is used to illuminate an appropriate gold pattern on a polyimide film mask. The mask is imaged onto the PMMA sample. A pattern with an area of up to 100 x 100 mm(2) can be fabricated with sub-micron resolution and a highly accurate order of a few microns by using a dragging mask. The fabrication technology has several advantages, such as forming complex 3D micro structures, high throughput and low cost.
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