Investigation of Ca3TaGa3Si2O14 Piezoelectric Crystals for High Temperature Sensors

Fapeng Yu,Shujun Zhang,Xian Zhao,Duorong Yuan,Lifeng Qin,Qing-ming Wang,Thomas R. Shrout
DOI: https://doi.org/10.1063/1.3592347
IF: 2.877
2011-01-01
Journal of Applied Physics
Abstract:The dielectric and electromechanical properties of fully ordered Ca3TaGa3Si2O14 (CTGS) crystals were investigated over the temperature range of -60 similar to 700 degrees C. The highest electromechanical coupling factor, k(26) (18.9%) and piezoelectric coefficient, d(26) (-11.5 pC/N) were obtained for (YXl)-25 degrees cuts. The temperature dependent behavior of resonance frequency (f(r)) was investigated in single-rotated thickness shear mode (TSM) (YXl)theta cuts (theta = -35 degrees similar to 10 degrees). The turnover temperatures of resonance frequency were found to increase from 20 degrees C to 330 degrees C, as the rotation angle h varied from -22.5 degrees to -35 degrees. Bulk acoustic wave (BAW) resonators based on Y(-30 degrees) monolithic disks with a fundamental frequency similar to 2.87 MHz were fabricated, where the in air mechanical quality factor Q was found to be on the order of 24000 and 10000 at 20 degrees C and 700 degrees C, respectively. The high coupling k(26), high mechanical Q, and high electrical resistivity (16 M Omega.cm) at 700 degrees C, together with the near zero TCF characteristics at elevated temperatures, demonstrate the potential of CTGS crystals for high temperature sensor applications. (C) 2011 American Institute of Physics. [doi:10.1063/1.3592347]
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