Improvement of Magnetic Fluid Sealing of Film Depositors with Double Shafts

Feifei Xing,Decai Li

DOI: https://doi.org/10.3969/j.issn.1672-7126.2011.03.22

2011-01-01

Abstract:A novel technique was developed to improve the magnetic fluid sealing scheme of the film depositors with two driving shafts. In the newly-developed technique, the shafts, teeth of the magnetic fluid seals and permanent magnets were completely sealed. The magnetic field distributions of the magnetic fluid sealing were simulated with the software package, Ansyst. The dependence of the anti-pressure capacity on the magnetic fluid injection was also experimentally studied. Extensive tests were performed to evaluate the sealing characteristics of the newly-developed technique. The test results were found to be satisfactory. The design considerations and further improvement of the technique were also tentatively discussed.