Abstract:Multiplefield coupling is a typical characteristic of most mechanical structures in microelectromechanical system (MEMS), that involves the effects due to mechanical, electrostatic, magnetic, thermal actions, etc. Dynamic behaviors of the microstructures in those fields are of importance to estimate the design and manufacturing of the microsystem. In this paper, electromechanical analyses of some microstructures are presented based on a combination of boundary element method (BEM) and finite element method (FEM), to show the hybrid numerical technique not only useful to analyze the flexible deformation of the structures under electrostatic forces, but also important to evaluate the parameter variations of the electronic fields as the movement of the mechanical structures in those structronic systems. The simulation procedure is verified by both analytical solutions of some examples and experimental results of some microstructures driven by electrostatic field, in which the mechanical parameters such as the divergence of the deflection solution is related to the electrical characteristic such as the critical voltages of the electrostatic forces. Based on the structures involved in a laterally vibratory polysilicon gyroscope fabricated in our institute, the control equations of microgyroscope dynamics are presented, from that the response simulations of the microgyro are performed with the changes of the characteristic parameters, such as resonant frequency, quality factors, frequency disturbance, etc. Those results are useful for the optimal design of the structronic systems and the quality evaluation of the microprocessing, which are related to the rate measurement sensitivity and the output stability of the microsystem.

In-Phase Coupling Forces Induced by Air Flow and Drive Force in Split-Mode Silicon Micromachined Linear Vibratory Gyroscopes

Identification of the Coupling Forces Ratio in Silicon Vibratory MEMS Gyroscopes

Analysis of In-Phase Coupling Error in the Vibratory MEMS Gyroscope with Various Vacuum Degrees

One-time Frequency Sweep to Eliminate IQ Coupling in MEMS Vibratory Gyroscopes

Identification and Suppression of Driving Force Misalignment Angle for a MEMS Gyroscope Using Parametric Excitation

Effects of Structural Dimension Variation on the Vibration of MEMS Ring-Based Gyroscopes

A MICROMECHANICAL MODE-MATCHED GYROSCOPE USING STIFFNESS NONLINEARITY AND ELECTROSTATIC TUNING

An Electrostatically-driven Capacitively-sensed Frame Microgyroscope Fabricated with an Improved Process Flow

Effects of Combs on Coupling Error in the Vibratory MEMS Gyroscope with Various Air Dampings

Separation and identification for structure error parameter in vibratory silicon MEMS gyroscopes

Structure-air Damping Coupling Analysis of Micromachined Gyroscope

Analysis of the Mechanical Coupling Characteristics of a Monolithic Tri-Axis MEMS Gyroscope

Study on the Influence Induced by Electrical Coupling among Interconnection Lines in MEMS Gyroscopes

An experimental investigation on decoupling performance for a lateral axis micromachined gyroscope with varying environmental parameters

Design And Simulation Of A Completely Decoupled Micromechanical Gyroscope

Gas Damping Coefficient Research for MEMS Comb Linear Vibration Gyroscope

Electromechanical Analysis of Microelectromechanical Structures and Dynamic Simulations of Laterally Vibratory Microgyroscope

One Mechanically Decoupled Z-axis Gyroscope

Decoupling Control of Micromachined Spinning-Rotor Gyroscope with Electrostatic Suspension

Coupled Analysis on the Micro-Airflow and Its Actuator for Mems Fluidic Devices

Study of the Influence of Phase Noise on the MEMS Disk Resonator Gyroscope Interface Circuit