Separation and identification for structure error parameter in vibratory silicon MEMS gyroscopes

YANG Jun,GAO Zhong-yu,ZHANG Rong,CHEN Zhi-yong,ZHOU Bin

DOI: https://doi.org/10.3969/j.issn.1005-6734.2007.03.016

2007-01-01

Abstract:A three-freedom dynamics model of gyroscopes was developed,and the mechanism of generating cross-coupling error sources in MEMS gyroscopes were analyzed. The analysis demonstrates that the structure imperfections are the main cause that leads to the gyro coupling error. The experiment approach to separate and identify main structure error parameters was presented based on the vibrating and mode theories. The experiment results demonstrate that the quadrature component and the in-phase component are the main error sources of gyroscopes. The main reasons resulting in the quadrature component include the cross-coupling stiffness between the drive and the sense,and the stiffness asymmetry between drive beams and between sense beams. The cross-coupling dampness between the drive and the sense,and stiffness asymmetry between sense beams and drive force asymmetry mainly contribute to the in-phase component of the gyro bias. The identified structure parameters can provide basis for structure design,laser trimming,and coupling error reduction in gyroscope.