Fabrication of carbon nanotubes field emitter arrays on the flexible substrate using reversal roller imprint lithography

Lei Yin,Hongzhong Liu,YongSheng Shi,Xiaoning He,Yucheng Ding
DOI: https://doi.org/10.1504/IJNM.2011.042479
2011-01-01
International Journal of Nanomanufacturing
Abstract:Fabrication of carbon nanotubes (CNTs) field emitter arrays (FEAs) on flexible substrate was demonstrated with a novel microfabrication technique, namely, reversal roller imprint lithography (RRIL). In this process, CNTs paste was inkjetted coating onto a patterned roller mould and squeezed into the microstructures of the roller mould by an elasticity scraper, and then it was transferred to the flexible substrate with a suitable contact pressure. The field emission measurement showed that the turn-on field was about 2.3 V/μm at the emission current density of 10 μA/cm 2. This process was suitable for the fabrication of flexible electronic devices with CNTs. © 2011 Inderscience Enterprises Ltd.
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