Barrier layer effect on photoelectric properties of MSM photodetectors based on black silicon

Yuanjie Su,Yadong Jiang,Zhiming Wu,Guodong Zhao
DOI: https://doi.org/10.1109/ICEOE.2011.6013370
2011-01-01
Abstract:This paper focuses on the influence of barrier layer on photoelectric properties of MSM photodetectors based on black silicon. Si 3N 4 barrier layers with different thickness were added between the black silicon layer and electrodes in the MSM structure by PECVD. According to the results, the thickness of barrier layer plays a crucial role in reducing the dark current and increasing the Signal Noise Rate(SNR) of the detector. In the end, we obtained an optimum thickness that could not only ensure a high SNR but also lead the photodetector to a great responsivity. © 2011 IEEE.
What problem does this paper attempt to address?