Abstract:This paper presents characterization and compensation of the thermal bias drift of a MEMS accelerometer whose effective stiffness is electrostatically tuned to a low value with the help of the single-sided parallel plates (SSPPs) capacitors. A temperature drift model for the proposed accelerometer is built and the temperature effect on the mechanical stiffness and the circuit gains is characterized. The characterization reveals that the variations of the feedforward coefficient including the mechanical stiffness and the readout gain due to the temperature change play a significant role in the bias drift of output of the proposed closed-loop accelerometer. On the other hand, the variations of both feedback gain and tuning gain as a function of temperature are one-order-of-magnitude less than that of the feedforward coefficient. To calibrate the feedforward coefficient, an excitation signal as a form of AC reference displacement is introduced to drive the proof mass and the readout response is demodulated to calibrate the variance of the feedforward coefficient correspondingly. An open-loop compensation scheme for the temperature-induced bias drift using the variance of the calibrated response is proposed accordingly. Alternatively, the calibrated response can be controlled to a preset value by a new proportion integral derivative (PID) controller by the adjustment of the SSPP tuning voltage. The output of the PID controller is used for the calibration of the introduced bias from the electrostatic tuning force. Therefore, a closed-loop compensation of the thermal bias drift is achieved by remaining the feedforward coefficient while eliminating the calibrated bias. Experiments under a temperature cooling process and different tuning voltages are carried out to verify two proposed compensation schemes. The temperature drift coefficients (TDCs) of both compensated outputs exhibit at least one-order-of-magnitude reduction in response to the temperature change. When the effective stiffness of the accelerometer is tuned to about 4.19 N m(-1), the TDC of the compensated output using the proposed open-loop or closed-loop compensation schemes is reduced to about 0.1136 or 0.0391 mg degrees C-1, respectively and meanwhile, the Allan bias instability is slightly increased to 48.63 or 56.14 mu g, respectively.

Method for reducing vibration deflection on micromechanical accelerometer

Analysis of the Frequency-Dependent Vibration Rectification Error in Area-Variation-Based Capacitive MEMS Accelerometers.

A Stiffness-Tunable MEMS Accelerometer

Characterization and Compensation of Thermal Bias Drift of a Stiffness-Tunable MEMS Accelerometer

Analysis and Amelioration about the Cross-Sensitivity of A High Resolution Moems Accelerometer Based on Diffraction Grating

Accurate mechanical-optical theoretical model of cross-axis sensitivity of an interferometric micro-optomechanical accelerometer

Temperature Drift Compensation of a Tuned Low Stiffness MEMS Accelerometer Based on Double-Sided Parallel Plates

Temperature Bias Drift Phase-Based Compensation for a MEMS Accelerometer with Stiffness-Tuning Double-Sided Parallel Plate Capacitors

A Stiffness-tunable MEMS Accelerometer with In-operation Drift Compensation

A Dual-Loop Waveform Distortion Suppression Method for Electromagnetic Vibrators at Low Frequencies

Design of Force-Balance Capacitive Accelerometer

Adapting adjustment of stiffness for force feedback micro accelerometer

Vibration Sensitivity Reduction of Micromachined Tuning Fork Gyroscopes through Stiffness Match Method with Negative Electrostatic Spring Effect

Modeling and Compensation of Cross-Axis Coupling in an Electrostatic Accelerometer for Testing the Equivalence Principle

Structural Design and Testing of a Micromechanical Resonant Accelerometer

Improvement of CMOS-MEMS accelerometer using the symmetric layers stacking design

A Low Cross-Axis Sensitivity Micro-Grating Accelerometer With Double-Layer Cantilever Beams

Study on the Mech Anical Stiffness of the Flexible Beams in a Micro-Machined Accelerometer

Temperature Gradient Method for Alleviating Bonding-Induced Warpage in a High-Precision Capacitive MEMS Accelerometer

Identification and adjustment of the position and attitude for the electrostatic accelerometer's proof mass

Analysis and Prevention for Oscillation Failure of Capacitive Micro-Accelerometers