Crystallization Process of Amorphous GaSb$_{5}$Te$_{4}$ Film for High-Speed Phase Change Memory

Yegang Lu,Sannian Song,Zhitang Song,Wanchun Ren,Yan Cheng,Bo Liu
DOI: https://doi.org/10.1143/apex.4.094102
IF: 2.819
2011-01-01
Applied Physics Express
Abstract:GaSb5Te4 material was used as the storage medium of phase change memory. The switching between amorphous and crystalline states could be triggered by an electric pulse as short as 10 ns. With the resistance ratio of two orders of magnitude, the endurance test was up to 6.7×104 cycles. The temperature for 10 year data retention was about 104 °C higher than that of Ge2Sb2Te5. The crystallization process in GaSb5Te4 film is found to be the random formation of prism-shaped crystallites different from that of Ge2Sb2Te5. The formation of the percolation path for conductivity is the main reason for the fast switching.
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