Abstract:The paper presents a study of surface acoustic waves propagation in a damage layer with finite thickness and residual stress on an orthotropic semi-infinite medium to reveal the application of laser ultrasound in the surface inspection of ground silicon wafers. Biot's theory of small deformations influenced by initial stress forms the basis for this study. Considering the case that the displacement and boundary forces are continuous at the interface and the forces vanish on the free surface, the required dispersion relation is obtained. We consider a sample of (100) silicon wafer by grinding with fine abrasive grains, which has a machined face with a micrometer-level thickness of surface damage and residual stress. In order to discuss the impact of propagation directions, degree of surface damage, residual compressive stress on the velocity characteristics of surface waves, the numerical computation of the dispersion equations is performed. It has been found that surface damage has a significant effect on the dispersion curve, while the residual compressive stress can only cause a small decrease Δc in the surface wave velocity. The velocity decrease Δc becomes obvious at high frequencies. For a fixed residual compressive stress and frequency, Δc hardly changes with the degree of surface damage and propagation directions. Based on the above characteristics, we study the inverse problem on detecting both surface damage and residual stress simultaneously by SAW velocities and give a corresponding iterative algorithm. This study may provide theoretical guidance for non-destructive testing of residual stress.

The detection of different physical properties of laser-damaged HfO 2 film on SiO2 substrate by scanning probe acoustic microscope

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Quantitative Characterization of Surface and Subsurface Topography of An Optical Nano-Film/Substrate Using Scanning Probe Acoustic Microscopy

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Characterization of Laser Induced Damage of HR Coatings with Picosecond Pulses

Laser-Induced Damage on Fused Silica with Photo-Acoustic Method

Investigation on picosecond laser-induced damage in HfO 2 /SiO 2 high-reflective coatings

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Investigating the material properties of HfO2/SiO2-based anti-reflection coatings during 1064 nm laser-induced breakdown in air and vacuum conditions

Study on the relationship between the damage of machined surface layer and the dispersion curve of laser-induced surface acoustic wave

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Study on Laser Damage Properties of Thin Films

Subsurface defect of the SiOx film imaged by atomic force acoustic microscopy

Characterization of laser damage performance of fused silica using photothermal absorption technique

Laser Damage Test Platform for Optical Thin Film