X-ray photoelectron spectroscopy of (La0.7Sr0.3) MnO3 thin films prepared by pulsed laser deposition

HuiFang Xiong,TieDong Cheng,Xingui Tang,jian chen,Qiuxiang Liu
DOI: https://doi.org/10.4028/www.scientific.net/AMR.284-286.2191
2011-01-01
Abstract:(La0.7Sr0.3)MnO3 (LSMO) thin films were grown on Si (100) substrate by using pulsed laser deposition (PLD) process. Both structure and surface morphology of the films were investigated by X-ray diffraction (XRD) and atomic force microscopy (AFM). Furthermore, the chemical states and chemical composition of the films were determined by X-ray photoelectron spectroscopy (XPS) near the surface. From XRD, the results indicate that the films grown on Si (100) substrates have a single pseudocubic perovskite phase structure with a high (100) orientation. The XPS results show that La, Sr and Mn exist mainly in the forms of perovskite structure and a SrO layer was found on outermost surface. The films resistivity emeasured under room temperature is 6.4x10(-4) Omega.cm..
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