Package Technology for Microcavities

Wen-Dong Zhang,Ying-Zhan Yan,Jun Liu,Shu-Bin Yan,Chen-Yang Xue,Ji-Jun Xiong
DOI: https://doi.org/10.1117/12.893474
2011-01-01
Abstract:Although Microcavities are promising in a variety of novel devices, there is slow development in microcavity based practical devices due to the lack of the package technology. In this paper, for the first time, we demonstrate the package technology for the microcavity coupling system to promote the development of the microcavity based practical applications. The package process are illustrated in detail. The changes which result from the package are also discussed. In addition, the advantages of the packaged structure are characterized, including the Q maintenance, robustness and the convenience. These advantages make this packaged structure promising in microcavity based practical devices.
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