Phase-change memory on thin-film-transistor technology

Lin Li,Lining Zhang,Jin He,Mansun Chan
DOI: https://doi.org/10.1109/ISDRS.2011.6135282
2011-01-01
Abstract:Phase-change memory (PCM) stores information based on the PC material's property to reversibly switch between two resistance states by Joule heating with applied currents [1], and provides a new set of features combining features of the DRAM and the Flash memory. PCM on thin-film-transistor (TFT) technology can potentially offer a fast, high endurance and high-density non-volatile memory for system-on-panel applications. In this work, we demonstrate functional PCM on TFT technology for the first time. To overcome the low current drive and coarse design rule of TFT technology, thin-film-diodes (TFDs) with not only larger drive capability but also better leakage control than TFTs [2, 3] are fabricated with CMOS TFTs on the same glass wafer with the same fabrication process and implemented as PCM drivers. In addition, thermal responses of PCM on glass substrate for TFT technology are investigated. © 2011 IEEE.
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