Silicon-based fabry-perot microcavity with bragg grating reflectors

Jianwei Wang,Daoxin Dai,Sailing He

DOI: https://doi.org/10.1364/ps.2010.jtub38

2010-01-01

Abstract:A Fabry-Perot microcavity based on silicon nanowires is designed and fabricated. In order to obtain a high reflection, Bragg gratings are used as the F-P microcavity's reflectors. The numerical simulation and experimental results are presented. © OSA / IPR/PS 2010.

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Tunable Silicon Reflection Cavity Mirror Based on Microring Resonator

Li Xia,Wang Chao,Yu Hui,Jiang Xiaoqing

DOI: https://doi.org/10.3788/aos201636.1223002

2016-01-01

Acta Optica Sinica

Abstract:Considering the requirement of monochromaticity and tunability for resonator used in on-chip optical interconnect source,we design and make a tunable silicon reflection cavity mirror based on microring resonator,using complementary metal-oxide-semiconductor technology and silicon material on insulating substrate.The performance of the reflection cavity is analyzed by the transfer-matrix method,and we find that the reflection cavity shows good properties in sharpness and extinction ratio.The experimental results show that the reflectivity of the reflection cavity can reach 90％ at the wavelength of 1549 nm,the quality factor is 3 × 104,and the free spectral range (FSR) is 9.6 nm.By applying the thermo-optic modulation to the microring resonator,the wavelength tunability in FSR can be realized within the power range of 0-40.5 mW.
Fabrication of Optical Cavities with Femtosecond Laser Pulses

Jintian Lin,Jiangxin Song,Jialei Tang,Wei Fang,Koji Sugioka,Ya Cheng

DOI: https://doi.org/10.1117/12.2041353

2014-01-01

Abstract:We report on fabrication of three-dimensional (3D) high-quality (Q) whispering-gallery-mode microcavities by femtosecond laser micromachining. The main fabrication procedures include the formation of on-chip freestanding microdisk through selective material removal by femtosecond laser pulses, followed by surface smoothing processes (CO2 laser reflow for amorphous glass and focused ion beam (FIB) sidewall milling for crystalline materials) to improve the Q factors. Fused silica microcavities with 3D geometries are demonstrated with Q factors exceeding 106. A microcavity laser based on Nd:glass has been fabricated, showing a threshold as low as 69μW via free space continuous-wave optical excitation at the room temperature. CaF2 crystalline microcavities with Q factor of ~4.2×104 have also been demonstrated. This technique allows us to fabricate 3D high-Q microcavities in various transparent materials such as glass and crystals, which will benefit a broad spectrum of applications such as nonlinear optics, quantum optics, and bio-sensing.
A Simple Approach to Fiber-Based Tunable Microcavity with High Coupling Efficiency

Peng Qing,Jue Gong,Xing Lin,Ni Yao,Weidong Shen,Arash Rahimi-Iman,Wei Fang,Limin Tong

DOI: https://doi.org/10.1063/1.5083011

IF: 4

2019-01-01

Applied Physics Letters

Abstract:We report a simple technique for the realization of fiber-based Fabry-Pérot microcavities with large Q/V values as well as high cavity-to-fiber coupling efficiencies. The open microcavity we demonstrate consists of a flat mirror and a concave mirror on the tip of a single mode optical fiber. Combining hydrofluoric acid chemical wet etching with CO2 laser reflow, we obtain a fiber-tip atomically smooth concave surface with a diameter of 4.7 μm determined by the fiber core size. The concave surface with a spherical profile is automatically aligned with the fiber core, which enables high cavity-to-fiber power coupling efficiency (higher than 90%) with an optimal fiber-tip mirror's radius of curvature based on numerical simulation results. After distributed-Bragg-reflector coating, we have realized a wavelength-tunable open microcavity with a quality factor Q exceeding 1000 and a mode volume V of 13.6 μm3, and laser emission is demonstrated from this microcavity.
Fabrication-friendly High-Efficiency Silicon Nitride Grating Coupler

Pengfei Xu,Yanfeng Zhang,Zengkai Shao,Lin Liu,Lidan Zhou,Chunchuan Yang,Yujie Chen,Siyuan Yu

DOI: https://doi.org/10.1109/cleopr.2017.8118727

2017-01-01

Abstract:Grating coupler, as one of the key components can provide convenient on-wafer testing and packaging for integrated photonics. Silicon nitride (SiNx) grating coupler suffers from lower efficiency due to the relative low material refractive index. The efficiency of SiNx grating coupler can be improved by using high reflectivity silicon grating reflectors underneath. However, such silicon grating reflector requires several fabrication steps, including lithography, etching, high precision alignment (HPA), and chemical mechanical polishing (CMP). In this work, we demonstrate an easy-to-fabricate SiNx grating coupler only requiring a single patterning step without the need of HPA and CMP. A coupling coefficient of -2.5 dB and 1-dB-bandwidth of 65 nm have been experimentally measured.
High-Q and High-Order Side-Coupled Air-Mode Nanobeam Photonic Crystal Cavities in Silicon

Ping Yu,Huiye Qiu,Hui Yu,Feiqing Wu,Zhuoyuan Wang,Xiaoqing Jiang,Jianyi Yang

DOI: https://doi.org/10.1109/lpt.2016.2581205

IF: 2.6

2016-01-01

IEEE Photonics Technology Letters

Abstract:We demonstrate the design, fabrication, and characterization of side-coupled airmode nanobeam photonic crystal cavities in silicon-on-insulator platform. Results show that repeatable devices achieve similar high loaded quality factors (>10(4)) and large optical energy ratio in low refractive region. The unload Q-factors of the fabricated cavities are estimated to exceed 10(5). With side-coupled configuration, high transmission of through port is achieved with typical insertion loss less than 0.5 dB. Wavelength shifts of the measured resonances with respect to the designed values are observed and well explained by considering the fluctuation of etching depth. The demonstrated side-coupled airmode nanobeam photonic crystal cavities may find their applications in ultracompact integrated photonics, especially for on-chip photonic sensor, notch filter, or optical switch.
High-efficiency Wideband SiNx-on-SOI Grating Coupler with Low Fabrication Complexity.

Pengfei Xu,Yanfeng Zhang,Zengkai Shao,Lin Liu,Lidan Zhou,Chunchuan Yang,Yujie Chen,Siyuan Yu

DOI: https://doi.org/10.1364/ol.42.003391

IF: 3.6

2017-01-01

Optics Letters

Abstract:The chip-fiber grating coupler is a fundamental building block in integrated photonics, providing convenient on-wafer testing and packaging. Couplers based on a silicon nitride (SiNx) material platform can achieve wider bandwidths than silicon-based couplers, but suffer from lower efficiency due to the relative low material refractive index. The efficiency of the SiNx grating coupler can be improved by using high-reflectivity silicon grating reflectors underneath. However, such a silicon grating reflector requires several fabrication steps, including lithography, etching, high precision alignment (HPA), and chemical mechanical polishing (CMP). In this Letter, we demonstrate an easy-to-fabricate SiNx-on-SOI transverse-electric mode grating coupler requiring only one patterning step (grating alone), and without the need for HPA and CMP. A coupling coefficient of -2.5 dB and 1-dB-bandwidth of 65 nm has been experimentally measured.
Silicon Hybrid Plasmonic Bragg Grating Reflectors and High Q-factor Micro-Cavities

Peipeng Xu,Qiangsheng Huang,Yaocheng Shi

DOI: https://doi.org/10.1016/j.optcom.2012.10.002

IF: 2.4

2012-01-01

Optics Communications

Abstract:In this paper, we present Bragg reflectors and high-Q micro-cavities based on Si hybrid plasmonic waveguides. The Bragg reflector is formed by a periodic variation of the thickness of the low index layer in a hybrid plasmonic waveguide. The simulated results show that our reflectors have a relatively low loss compared to conventional MIM or IMI plasmonic Bragg grating reflectors. Hybrid plasmonic micro-cavities formed by the introduction of a defect into the grating are also investigated. Due to the fact that a hybrid plasmonic structure can efficiently confine light in deep subwavelength scale with a relatively low propagation loss, our hybrid plasmonic micro-cavities can reach a Q factor of 1235 at the wavelength of 1550nm.
Two-Frequency Brillouin Fiber Laser Based on Bragg Grating Fabry-Perot Cavity

YC Shen,XF Jin,XM Zhang,KS Chen

DOI: https://doi.org/10.1080/01468030590908304

2005-01-01

Fiber & Integrated Optics

Abstract:A novel and simple two-frequency Brillouin fiber laser is presented. It is based on a fiber Fabry-Perot cavity with fiber Bragg gratings as reflectors. The model of stimulated Brillouin scattering in fiber grating-based Fabry-Perot resonator is investigated. The laser allows conversion efficiency of close to 100% and suppresses the higher-order Stokes waves. The theoretical prediction is presented and the experimental demonstration is realized.
Birefringence compensated silicon nanowire arrayed waveguide grating for CWDM optical interconnects.

Jun Zou,Xiang Xia,Guanting Chen,Tingting Lang,Jian-Jun He

DOI: https://doi.org/10.1364/OL.39.001834

IF: 3.6

2014-01-01

Optics Letters

Abstract:We demonstrate an arrayed waveguide grating based on silicon nanowires with birefringence compensation for optical interconnects using coarse wavelength division multiplexing (CWDM). Angled star couplers are employed in combination with different diffraction orders for TM and TE polarizations. This device has a compact footprint of 0.36 mm x 0.17 mm. Theoretical and experimental results show that the polarization-dependent wavelength shifts (PD lambda) can be reduced from 380-420 to 0.5-3.5 nm, below 25% of the 3 dB bandwidth of channel response. The measured cross talk for TM polarization is better than -18 dB, and that for TE is better than -14 dB. (C) 2014 Optical Society of America
Optomechanics with a Sub-Wavelength Grating Inside a Fabry-Perot Cavity

Haitan Xu,Utku Kemiktarak,Corey Stambaugh,Jacob Taylor,John Lawall

DOI: https://doi.org/10.1364/ls.2014.lth1h.4

2014-01-01

Abstract:We place a silicon nitride membrane incorporating a subwavelength grating in the middle of an optical cavity. The high reflectivity of the grating couples the two sub-cavities with a normal mode splitting of 55 MHz.
Novel Method of Fabricating Fabry-Perot Cavity Employing MEMS Wet-Etching Process

M Xiang,YM Cai,YM Wu,JY Yang,YL Wang

DOI: https://doi.org/10.1117/12.521680

2004-01-01

Abstract:A new method is presented in this paper to fabricate Fabry-Perot (FP) cavity with MEMS bulk wet-etching technology, through which FP cavities can be achieved with the cavity length from several microns to tens of microns. The parallelism of mirror elements can be well achieved without electrostatic control. Some FP cavities were achieved that the insertion loss was less than -8dB, the full width half maximum (FVHM) was about 2 nm, and the efficient finesse is up to 50. Some factors which influence the finesse have also been analyzed. The further work is ongoing.
A Low Loss Band-Rejection And Band-Pass Filter Based On Silicon Photonic Multimode Bragg Gratings

Jianfei Jiang,Huiye Qiu,Yan Li,Gencheng Wang,Tingge Dai,Hui Yu,Jianyi Yang,Xiaoqing Jiang

DOI: https://doi.org/10.1109/cleoe-eqec.2017.8087116

2017-01-01

Abstract:Bragg gratings based devices have been widely employed in communication and sensing systems [1-2]. Conventional waveguide Bragg grating is a two-port device, so reflected light will damage the stability of the laser via its input port. Therefore, it is meaningful to design a waveguide Bragg grating with the separation of the input and the reflection in integrated photonic circuits. In this work, we design and fabricate anti-symmetric Bragg gratings in a multimode silicon strip waveguide, in which the contra-directional coupling occurs between the TE 0 and the TE 1 modes. An adiabatic coupler is used to drop the reflected TE 1 mode.
Red Light Emission from Si-Based Fabry-Perot Microcavities

但亚平,姚永昭,王燕,岳瑞峰,刘理天

DOI: https://doi.org/10.3969/j.issn.1674-4926.2003.z1.013

2003-01-01

Chinese Journal of Semiconductors

Abstract:A microcavity prepared by PE VD is proposed. Its distributed Bragg ref1ectors are composed of periodica11y stacked a-SiO2 = H/ a-Si= H 1ayers and the active 1ayer is filled With a-Si I= H. The structure ofa microcavity is determined through simu1ating. In eXperiment, a microcavity is prepared at 250 and annea1ed at different temperatures. Ref1ectance and Pl spectra are recorded on as-deposited and annea1ed samp1es. It is indicated that the as-deposited samp1e performs We11 and even better after annea1ed at 350 , however Worse after annea1ed at 450 .
Design of High-Quality Reflectors for Vertical Nanowire Lasers on Si

Xing Zhang,Hui Yang,Yunyan Zhang,Huiyun Liu

DOI: https://doi.org/10.1088/1361-6528/ac2f22

2021-03-31

Abstract:Nanowires (NWs) with a unique one-dimensional structure can monolithically integrate high-quality III-V semiconductors onto Si platform, which is highly promising to build lasers for Si photonics. However, the lasing from vertically-standing NWs on silicon is much more difficult to achieve compared with NWs broken off from substrates, causing significant challenges in the integration. Here, the challenge of achieving vertically-standing NW lasers is systematically analyzed. The poor optical reflectivity at the NW/Si interface results severe optical field leakage to the substrate, and the commonly used SiO2 or Si2N3 dielectric mask at the interface can only improve it to ~10%, which is the major obstacle for achieving low-threshold lasing. A NW super lattice distributed Bragg reflector is therefore proposed, which is able to greatly improve the reflectivity to >97%. This study provides a highly-feasible method to greatly improve the performance of vertically-standing NW lasers, which can boost the rapid development of Si photonics.

Optics
Optical nanofiber-based cavity induced by periodic air-nanohole arrays

Wenfang Li,Jinjin Du,Viet Giang Truong,Sile Nic Chormaic

DOI: https://doi.org/10.1063/1.4986789

2017-05-02

Abstract:We experimentally realized an optical nanofiber-based cavity by combining a 1-D photonic crystal and Bragg grating structures. The cavity morphology comprises a periodic, triplex air-cube introduced at the waist of the nanofiber. The cavity has been theoretically characterized using FDTD simulations to obtain the reflection and transmission spectra. We have also experimentally measured the transmission spectra and a Q-factor of ~784(87) for a very short periodic structure has been observed. The structure provides strong confinement of the cavity field and its potential for optical network integration makes it an ideal candidate for use in nanophotonic and quantum information systems.

Optics
Compact High-Efficiency Perfectly-Vertical Grating Coupler on Silicon at O-band.

Siya Wang,Yue Hong,Yuntao Zhu,Jingye Chen,Shengqian Gao,Xinlun Cai,Yaocheng Shi,Liu

DOI: https://doi.org/10.1364/oe.25.022032

IF: 3.8

2017-01-01

Optics Express

Abstract:A compact, high-efficiency grating coupler is demonstrated for interfacing a silicon waveguide and a perfectly-vertical fiber at O-band. The grating lies on a tilted silicon membrane for minimizing the reflections. Circular grating lines are adopted to shorten the overall device length to about 60μm. 57% peak coupling efficiency and >28nm 1-dB coupling bandwidth are obtained experimentally. Back reflections of 1% to the silicon waveguide and the single mode fiber are theoretically estimated. The processing flow to realize the proposed structure is discussed in detail. The fabrication control over the tilted angle of the silicon membrane is investigated. The approach by applying an oxide cladding to improve the stability of the membrane is also introduced. The present grating coupler is compatible to common fabrication processes for silicon photonic chips.
Deep Subwavelength Fabry-Perot-like Resonances in a Sandwiched Reflection Grating

C. P. Huang,X. G. Yin,Y. Zhang,S. B. Wang,Y. Y. Zhu,H. Liu,C. T. Chan

DOI: https://doi.org/10.1103/physrevb.85.235410

IF: 3.7

2012-01-01

Physical Review B

Abstract:A Fabry-Perot (FP) resonance cavity can be made to be subwavelength by manipulating the reflection phase at the boundaries. Here, we employ the open-ended slit cavities within a simple sandwiched reflection grating and show that a deep subwavelength FP-like resonance in the slits can be realized. An FP cavity with the length and width of tens of nanometers, which is two orders of magnitude smaller than the resonance wavelength, has been suggested. The effect is very robust and can operate from infrared to microwave frequencies.
Enhanced Reflection of GaAs Nanowire Laser Using Short-Period, Symmetric Double Metal Grating Reflectors

Qun Yu,Wei Wei,Xin Yan,Xia Zhang

DOI: https://doi.org/10.3390/nano12091482

2022-04-27

Abstract:Owing to the high contrast of the refractive indices at the end facets of a nanowire, lasing emission can be achieved in an individual nanowire without external, reflected feedback. However, the reflection provided by the end facet is not high enough to lower the threshold gain, especially for nanowires with smaller diameters. This work proposes a novel structure of nanowire laser partially sandwiched in double Ag gratings. Compared to a nanowire with a single metal grating or without a grating, the parallel double metal gratings play the reflector role with higher reflectivity to enhance the round-trip feedback and reduce the threshold gain. The reflective properties are calculated using the finite elements method. Simulation results show that a high reflectivity of more than 90% can be achieved when the number of periods is more than 8. The reflectivity of double gratings is 2.4 times larger than that of the nanowire end facet for large nanowire diameters. When the nanowire has a small diameter of 150 nm, the reflectivity of double gratings is 17 times larger than that of the nanowire end facet. Compared to a single grating, the reflective performance of double gratings is much better. Owing to the highly reflective properties of the double gratings, nanowires partially sandwiched in the double gratings can realize lasing emission at a very low threshold gain, and the period of the grating can be very short to benefit on-chip interconnection systems.
A Novel 3-D Microcavity Based on Bragg Fiber Dual-Tapers

Wen Wang,Wei Zhang,Wenxin Xing,Lichao Shi,Yidong Huang,Jiangde Peng

DOI: https://doi.org/10.1109/jlt.2009.2022764

IF: 4.7

2009-01-01

Journal of Lightwave Technology

Abstract:In this paper, a novel 3-D microcavity based on Bragg fiber dual-tapers is proposed. The principle and characteristics of the Bragg fiber dual-taper are analyzed firstly, showing that the dual-taper can function as a fiber mirror. Its reflection and transmission can be adjusted by the design of taper structure parameters. Then, the structure of a 3-D microcavity composed by two Bragg fiber dual-tapers is investigated by the finite-difference time domain method. The relation between the cavity-mode wavelengths and the cavity lengths shows that it can be looked as a Fabry-PEacuterot cavity, using the Bragg fiber dual-tapers as the mirrors. By proper design, a cavity-mode Q factor up to 4.0093times10 6 can be realized in this cavity. Its characteristics as narrowband filters are investigated, showing that its transmission spectrum has the shape of Lorenz curve and a finesse up to 10 5 can be realized if cavity mode with a high Q factor is used. The analysis shows that high-quality 3-D light confinement can be realized in the proposed Bragg fiber dual-taper microcavity, which has great potential in high-efficiency light-emitting devices and small fiber components.
Nanohole Induced Microfiber Bragg Gratings.

Ping Zhao,Yuhua Li,Jihua Zhang,Lei Shi,Xinliang Zhang

DOI: https://doi.org/10.1364/oe.20.028625

IF: 3.8

2012-01-01

Optics Express

Abstract:We demonstrate the fabrication of high-index-contrast microfiber Bragg gratings (MFBGs) using phase-mask technique under seconds' femtosecond laser ablation to drill periodic nanoholes in microfibers and study the aging properties of the gratings at room temperature. These sub-micrometer-diameter holes, benefited from the resolution of femtosecond laser micromachining beyond-diffraction limit, results in an effective negative refractive index change Δn ~-10(-3). Transmission dips over -23 dB are achieved for the gratings with excellent Gaussian apodization and 3-dB reflection bandwidths up to 1.14 nm. Moreover, the grating reflectivity increased by 3 dB, the resonant wavelength blue-shifted 1.35 nm after two weeks' placement of grating at room temperature and these gratings exhibit excellent stability in the following time. This makes them attractive elements in sensing, nanophotonics and nonlinear optics.

Silicon-based fabry-perot microcavity with bragg grating reflectors

Tunable Silicon Reflection Cavity Mirror Based on Microring Resonator

Fabrication of Optical Cavities with Femtosecond Laser Pulses

A Simple Approach to Fiber-Based Tunable Microcavity with High Coupling Efficiency

Fabrication-friendly High-Efficiency Silicon Nitride Grating Coupler

High-Q and High-Order Side-Coupled Air-Mode Nanobeam Photonic Crystal Cavities in Silicon

High-efficiency Wideband SiNx-on-SOI Grating Coupler with Low Fabrication Complexity.

Silicon Hybrid Plasmonic Bragg Grating Reflectors and High Q-factor Micro-Cavities

Two-Frequency Brillouin Fiber Laser Based on Bragg Grating Fabry-Perot Cavity

Birefringence compensated silicon nanowire arrayed waveguide grating for CWDM optical interconnects.

Optomechanics with a Sub-Wavelength Grating Inside a Fabry-Perot Cavity

Novel Method of Fabricating Fabry-Perot Cavity Employing MEMS Wet-Etching Process

A Low Loss Band-Rejection And Band-Pass Filter Based On Silicon Photonic Multimode Bragg Gratings

Red Light Emission from Si-Based Fabry-Perot Microcavities

Design of High-Quality Reflectors for Vertical Nanowire Lasers on Si

Optical nanofiber-based cavity induced by periodic air-nanohole arrays

Compact High-Efficiency Perfectly-Vertical Grating Coupler on Silicon at O-band.

Deep Subwavelength Fabry-Perot-like Resonances in a Sandwiched Reflection Grating

Enhanced Reflection of GaAs Nanowire Laser Using Short-Period, Symmetric Double Metal Grating Reflectors

A Novel 3-D Microcavity Based on Bragg Fiber Dual-Tapers

Nanohole Induced Microfiber Bragg Gratings.