Investigation of a SPR Waveguide Sensor Based on Angular Interrogation

Shiqi Fan,Mingyu Li,Jian-Jun He

DOI: https://doi.org/10.1109/acp.2010.5682583

2010-01-01

Abstract:A novel angular interrogation SPR waveguide sensor based on SOI material is theoretically investigated. The parameters of the sensor such as the thickness of Au and Ti film are optimized.

What problem does this paper attempt to address?

Polarization interference interrogation of angular surface plasmon resonance sensors with wide metal film thickness tolerance

Liu Le,Chen Xiangliang,Liu Zhiyi,Ma Suihua,Du Chan,He Yonghong,Guo Jihua

DOI: https://doi.org/10.1016/j.snb.2012.06.094

2012-01-01

Abstract:We apply the polarization interferometry (PI) technique to a one-dimensional SPR sensor based on angle interrogation, for improving the refractive index (RI) resolution and reducing the dependence of RI resolution on the thickness of metal films. We demonstrate experimentally that the PI technique could reduce the minimum of the SPR angular spectrum, and improve the RI resolution of the sensors with non-optimal metal films, reducing the dependence of the RI resolution on the thickness of metal films. Furthermore, the application of PI technique at the angles, which are smaller than the original angle affording the minimum, could further improve the RI resolution of the system even better than the original optimal condition. RI resolution ranging from 1.2 to 2.2×10−7 refractive index unit (RIU) is achieved with the thickness of the Au film ranging from 28.2 to 54.4nm. The PI technique has potential applications in producing SPR sensors with high RI resolution and wide metal film thickness tolerance.
A Symmetrical Optical Waveguide Based Surface Plasmon Resonance Biosensing System

Heng Shi,Zhiyi Liu,Xiaoxiao Wang,Jun Guo,Le Liu,Lin Luo,Jihua Guo,Hui Ma,Shuqing Sun,Yonghong He

DOI: https://doi.org/10.1016/j.snb.2013.05.005

2013-01-01

Abstract:In this work, we propose a MgF2/Au/MgF2/Analyte based, angle-interrogation surface plasmon resonance sensor. This symmetrical structure results in higher surface electric field strengths, and longer surface propagation lengths and depths. A refractive index resolution of 8.1×10−8RIU in fluid protocol and 3.5×10−7RIU in atmosphere protocol is acquired by a simple SPR imaging system. In order to demonstrate the biomedical applications of this system, we detect Escherichia coli with different concentrations using dopamine film on the sensor surface to immobilize antibodies. A detection limit of 103cfu/mL of E. coli bacteria is acquired from this system.
A Two-Dimensional Polarization Interferometry Based Parallel Scan Angular Surface Plasmon Resonance Biosensor

Le Liu,Suihua Ma,Yanhong Ji,Xinyuan Chong,Zhiyi Liu,Yonghong He,Jihua Guo

DOI: https://doi.org/10.1063/1.3553028

IF: 1.6

2011-01-01

Review of Scientific Instruments

Abstract:We describe a two-dimensional polarization interferometry based parallel scan angular surface plasmon resonance (SPR) biosensing technique. The method of line-shaped light illumination and parallel scan offers a high throughput. The simultaneous record of SPR angular spectrum enables the system to be unaffected by the time-dependent variation of the light source. The polarization interferometry technique lowers the minimum of the SPR dip and thereby reduces the noise related to the light intensity. Refractive index resolutions of 1.4 × 10(-6) refractive index unit (RIU) under normal condition and 4.6 × 10(-7) RIU under a more time-consuming condition are achieved in our angle interrogation based sensor. Meanwhile, a manually prepared DNA microarray has been detected, showing the potential applications of this technique in microarray analysis.
Design of a High-Performance Micro Integrated Surface Plasmon Resonance Sensor Based on Silicon-On-Insulator Rib Waveguide Array

Dengpeng Yuan,Ying Dong,Yujin Liu,Tianjian Li

DOI: https://doi.org/10.3390/s150717313

IF: 3.9

2015-01-01

Sensors

Abstract:Based on silicon-on-insulator (SOI) rib waveguide with large cross-section, a micro integrated surface plasmon resonance (SPR) biochemical sensor platform is proposed. SPR is excited at the deeply etched facet of the bend waveguide by the guiding mode and a bimetallic configuration is employed. With the advantages of SOI rib waveguide and the silicon microfabrication technology, an array of the SPR sensors can be composed to implement wavelength interrogation of the sensors’ output signal, so the spectrometer or other bulky and expensive equipment are not necessary, which enables the SPR sensor to realize the miniaturization and integration of the entire sensing system. The performances of the SPR sensor element are verified by using the two-dimensional finite-different time-domain method. The parameters of the sensor element and the array are optimized for the achievement of high performance for biochemical sensing application. As a typical example, a single bimetallic SPR sensor with 3 nm Au over 32 nm Al possesses a high sensitivity of 3.968 × 104 nm/RIU, a detection-accuracy of 14.7 μm−1. For a uniparted SPR sensor, it can achieve a detection limit of 5.04 × 10−7 RIU. With the relative power measurement accuracy of 0.01 dB, the refractive index variation of 1.14 × 10−5 RIU can be detected by the SPR sensor array.
Polarization-interferometry-based Wavelength-Interrogation Surface Plasmon Resonance Imager for Analysis of Microarrays

Zhiyi Liu,Le Liu,Xiaoxiao Wang,Heng Shi,Xinyuan Chong,Suihua Ma,Yanhong Ji,Jihua Guo,Hui Ma,Yonghong He

DOI: https://doi.org/10.1117/1.jbo.17.3.036002

IF: 3.758

2012-01-01

Journal of Biomedical Optics

Abstract:Polarization interferometry (PI) techniques, which are able to improve surface plasmon resonance (SPR) sensing performance and reduce restrictions on allowable parameters of SPR-supporting metal films, have been experimentally realized only in SPR sensors using monochromatic light as a source. Wavelength-interrogation SPR sensors modulated by PI techniques have not been reported due to the wavelength-sensitive characterization of PI phase compensators. In this work we develop a specially designed rhombic prism for phase compensating which is totally insensitive to wavelength. For the first time we successfully apply PI technique to a wavelength-interrogation SPR imager. This imager is able to offer two-dimensional imaging of the whole array plane. As a result of PI modulation, resolutions of 1.3 x 10(-6) refractive index unit (RIU) under the normal condition and 3.9 x 10(-7) RIU under a more time-consuming condition are acquired. The application of this imager was demonstrated by reading microarrays for identification of bacteria, and SPR results were confirmed by means of fluorescence imaging. (C) 2012 Society of Photo-Optical Instrumentation Engineers (SPIE). [DOI: 10.1117/1.JBO.17.3.036002]
Axial Spatial Refractive Index Distribution of Surface Plasmon Resonance Sensor Based on Multi-Wavelength Angular Interrogation Structure

Yi Sun,Haoyuan Cai,Xin Qiao,Bing Zhang,Shuyue Zhan,Xiaoping Wang

DOI: https://doi.org/10.1117/12.2524655

2019-01-01

Abstract:Surface plasmon resonance (SPR) sensing technology is widely used in the field of biosensors due to its non-marking, high-sensitivity, and non-invasive characteristics. However, SPR technology is still limited to sensing analysis in two-dimensional plane, axial detection, as the key of SPR application in three-dimensional medium spatial detection, has not been well studied and solved. In an angle-interrogation SPR sensing system, the spatial characteristics of evanescent wave-dielectric interaction at multiple wavelengths are studied, and the factors affecting the spatial distribution of surface plasmon resonance are also analyzed. An axial spatial resolution method based on the particle swarm optimization (PSO) algorithm with multi-wavelength angle-interrogation structure is proposed, the refractive index distribution in axial space is determined by analyzing the characteristic SPR signal. In addition, the calculation and analysis of the applicable range of wavelengths are carried out. In the reliable spectral range of the incident light wavelength of 600-900 nm, the average error of the axial refractive index spatial resolution increases from 10(-5) RIU to 10(-4) RIU as the number of axial layers increases. The proposed multi-wavelength angle modulation structure analysis method based on PSO algorithm extends the SPR detection range from two-dimensional plane to three-dimensional space, which provides a new and promising analysis model for molecular biology.
A Sensitive Bi-Reflection Surface Plasmon Resonance Waveguide Sensor Based On Sion

Wei Zhang,Xiaohai Xiong,Luping Zhu,Mingyu Li,Jianjun He

DOI: https://doi.org/10.1109/ICOCN.2013.6617199

2013-01-01

Abstract:A high-performance bi-reflection surface plasmon resonance waveguide sensor based on SiON was proposed. The thickness of Ag is optimized. The detection limit and the sensitivity are improved at the expense of loss using two planar reflection surfaces. A sensitivity of 103.8degree/RIU or 2.86x10(4)dB/RIU as well as a refractive index variation of 1x10(-5)RIU were measured.
Theoretical and Experimental Study of a Highly Sensitive SPR Biosensor Based on Au Grating and Au Film Coupling Structure

Haoyuan Cai,Mengwei Wang,Jing Liu,Xiaoping Wang

DOI: https://doi.org/10.1364/oe.461768

IF: 3.8

2022-01-01

Optics Express

Abstract:A high-sensitivity surface plasmon resonance (SPR) sensor based on the coupling of Au grating and Au film is investigated through simulations and experiments. The SPR sensor is designed by using a hybrid method composed of genetic algorithm (GA) and rigorous coupled wave analysis (RCWA). The numerical results indicate the sensor has an angular sensitivity of 397.3°/RIU (refractive index unit), which is approximately 2.81 times higher than the conventional Au-based sensor and it is verified by experiments. Theoretical analysis, by finite-difference time-domain (FDTD) method, demonstrates the co-coupling between surface plasmon polaritons (SPPs) propagating on the surface of Au film and localized surface plasmons (LSPs) in the Au grating nanostructure, improving the sensitivity of the SPR sensor. According to the optimized structural parameters, the proposed sensor is fabricated using e-beam lithography and magnetron sputtering. In addition, the proposed sensor is very sensitive to the detection of small molecules. The limit of detection (LOD) for okadaic acid (OA) is 0.72 ng/mL based on an indirect competitive inhibition method, which is approximately 38 times lower than the conventional Au sensor. Such a high-sensitivity SPR biosensor has potential in the applications of immunoassays and clinical diagnosis.
Optical Waveguide Double-Ring Sensor Using Intensity Interrogation with a Low-Cost Broadband Source

Lei Jin,Mingyu Li,Jian-Jun He

DOI: https://doi.org/10.1364/ol.36.001128

2011-01-01

Abstract:A highly sensitive optical waveguide sensor based on simple intensity interrogation with a broadband light source is proposed and investigated. It consists of two cascaded microring resonators with the same or slightly different free spectral ranges. The variation of the refractive index of the analyte sample results in a large shift in the envelope function of the transmission peaks of the sensor, and, consequently, a large change in the transmitted power. The low-cost sensing scheme can achieve an ultrahigh sensitivity of 2 x 10(4) dB/RIU. Experimental results on the intensity interrogated double-ring sensor using a broadband source are presented, demonstrating its operation principle and potential for low-cost practical applications. (C) 2011 Optical Society of America
A Surface Plasmon Resonance Sensor Based on Silicon-On-Insulator Rib Waveguide

Yueming Liu,Xi Wang,Ying Ding,Xiaohao Wang

DOI: https://doi.org/10.1117/12.2504272

2018-01-01

Abstract:Taking the advantages of SOI rib waveguide, a compact and efficient SPR sensor based on SOI rib waveguide is proposed. Ribs and air trenches are formed by ICP deep etch on SOI wafer. Then, the metal film for SPR is sputtered on the sidewall of the air trench. A tunable laser and an optical power meter are used to test the sensor. The sensor with micron dimensions can be directly end face coupled with the single-mode fibers of the laser and the power meter. Resonance curves of water and milk are obtained. The sensitivity of the sensor can reach 1200nm/RIU.
Highly-Sensitive Optical Biosensors Based on Silicon-On-Insulator Nanowire Waveguide

Jian-Jun He

DOI: https://doi.org/10.1109/piers.2016.7734728

2016-01-01

Abstract:Summary form only given. Optical waveguide sensors based on silicon-on-insulator (SOI) nanowire have received great interest due to their potential applications in many fields including bacteria and virus detection, medical diagnostics, food quality control, environment monitoring, and drug development. Various types of SOI sensors have been developed, including Mach-Zehnder interferometer, microdisks and microring resonators. High-sensitivity sensors based on cascaded double-ring resonators and a Mach-Zehnder interferometer (MZI) cascaded with a microring resonator employing Vernier effect have recently been proposed and experimentally demonstrated. Simple and low-cost intensity interrogation can be employed without using a high resolution spectrometer or a narrow line-width tunable laser. Label-free detection capability of these two types of SOI sensors have also been demonstrated. This talk reviews our work on the design, fabrication and measurement of SOI nanowire based high-sensitivity biosensors employing Vernier effect. Biosensing experiments using cascaded double-ring sensor and Mach-Zehnder-ring sensor integrated with microfluidic channels are also presented.
Intensity Interrogated Planar Waveguide Biosensors

Jian-Jun He

DOI: https://doi.org/10.1364/iont.2012.if3b.1

2012-01-01

Abstract:Planar waveguide biosensors based on cascaded resonators are presented. Vernier effect is used to increase the sensitivity. Simple intensity interrogation schemes are developed to advance the planar waveguide sensor technology towards low-cost practical applications. © 2012 OSA.
Novel SPR Sensor Based on MIM-based Waveguide and an Asymmetric Cross-shaped Resonator

Su Chang,Zhu Jun

DOI: https://doi.org/10.1007/s11468-020-01348-8

IF: 2.726

2021-01-01

Plasmonics

Abstract:In recent years, sensing structures based on Fano resonances have become a hot research topic. In this study, a coupled structure, composed of a metal baffle metal-insulator-metal waveguide and an asymmetric cross-shaped resonator, is designed. By changing the coupling distance and asymmetry of the cross-shaped resonator, their influences on the transmission and electromagnetic field distribution were calculated and systematically analyzed. The results showed a good linear relationship between the center wavelength of the Fano transmission peak and the refractive index of the filled material. The sensor sensitivity can reach 795 nm/RIU. The prospective applications of this waveguide structure are promising. The structure can also provide a future reference for the design of a microwave waveguide structure.
Sensitivity enhancement of surface plasmon resonance imaging sensor with structural parameter optimization based on polarization contrast modulation

Yi Sun,Ya Gao,Tingting Yang,Xu Ma,Xiaoping Wang

DOI: https://doi.org/10.1117/12.2318588

2018-01-01

Abstract:The Abstracts A method, based on particle swarm optimization (PSO) and finite-difference time-domain (FDTD) simulation, is proposed to optimize micro-well structural parameter of SPRi sensor with polarization contrast modulation. According to PSO algorithm, these six structural parameters are optimized Following that, the electromagnetic field characteristics of the gold micro-well structure involving the background gold film thickness are simulated and optimized by FDTD. It is proved that the sensitivity of the optimized structure is four times higher than the traditional one, which shows the practicability of the home-built SPRi sensor, in addition, as a result of the high signal-to-noise ratio, the refractive index resolution of the sensor is two order of the magnitude lower. Besides that, optimization algorithm provides a new way for other SPR sensor optimization.
Research and Optimization on Novel SPW Sensor with a High Sensitivity by Using the Double Metal Layers Structure

DI Yue-miao,WANG Xiao-ping

DOI: https://doi.org/10.3969/j.issn.1004-1699.2006.04.013

2006-01-01

Abstract:For a traditional SPW(surface plasma wave) sensor , the gold coating can not accrete on the surface of the silicon prism tightly, which decrease the life period of the sensor. In the present paper, a novel structure is introduced by adding a silver layer between the gold layer and the prism in order to improve the adhesion intensity. The added layer gives more freedoms for design (i.e., the thickness of the silver and gold layers). Based on a GA(gene algorithm) method, we obtain the better performances (e.g., sensitivity and linearity) compared with the traditional design.
[Research on Symmetrical Optical Waveguide Based Surface Plasmon Resonance Sensing with Spectral Interrogation].

Zhang Yi-long,Liu Le,Guo Jun,Zhang Peng-fei,Ma Hui,He Yong-hong

DOI: https://doi.org/10.3964/j.issn.1000-0593(2015)02-0289-04

2015-01-01

Abstract:Surface plasmon resonance (SPR) sensors with spectral interrogation can adopt fiber to transmit light signals, thus leaving the sensing part separated, which is very convenient for miniaturization, remote-sensing and on-site analysis. Symmetrical optical waveguide (SOW) SPR has the same refractive index of the-two buffer media layers adjacent to the metal film, resulting in longer propagation distance, deeper penetration depth and better performance compared to conventional SPR In the present paper, we developed a symmetrical optical, waveguide (SOW) SPR sensor with wavelength interrogation. In the system, MgF2-Au-MgF2 film was used as SOW module for glucose sensing, and a fiber based light source and detection was used in the spectral interrogation. In the experiment, a refractive index resolution of 2.8 x 10(-7) RIU in fluid protocol was acquired. This technique provides advantages of high resolution and could have potential use in compact design, on-site analysis and remote sensing.
Silicon-on-Insulator Nanowire Based Optical Waveguide Biosensors

Mingyu Li,Yong Liu,Yangqing Chen,Jian-Jun He

DOI: https://doi.org/10.1088/1742-6596/680/1/012004

2016-01-01

Journal of Physics Conference Series

Abstract:Optical waveguide biosensors based on silicon-on-insulator (SOI) nanowire have been developed for label free molecular detection. This paper reviews our work on the design, fabrication and measurement of SOI nanowire based high-sensitivity biosensors employing Vernier effect. Biosensing experiments using cascaded double-ring sensor and Mach-Zehnder- ring sensor integrated with microfluidic channels are demonstrated
Design and Fabrication of a SOI Optical Waveguide Sensing Platform for Biochemical Sensor Application

Yu Jin Liu,Ying Dong,Deng Peng Yuan,Tian Jian Li

DOI: https://doi.org/10.4028/www.scientific.net/kem.645-646.777

2015-01-01

Key Engineering Materials

Abstract:A micro biochemical sensor based on a SOI optical waveguide sensing platform is reported in this article. The sensing platform utilizes a Mach-Zehnder Interferometer (MZI) configuration. In order to satisfy the single-mode transmission condition of the waveguide and match the coupling size of standard single-mode fiber, a ridge waveguide structure is adopted to construct the MZI configuration. The key parameters of the waveguide are optimized by FDTD method. A process composed of contact exposure photolithography and Inductively Coupled Plasma (ICP) etching technology has been worked out for the fabrication of the optical waveguide sensing platform on SOI wafer. In the process, only one photolithographic mask is used. The mask is designed to have several patterns including an array of MZI configurations for multiple species sensing, a group of ridge waveguides with different key parameters as test references, and a group of geometric compensation schemes to test the methods of modifying the deviation which may arise during the ICP etching step. Process simulations are conducted to predict the exposure and etching results, which give strong support to the fabrication process control. Lithography problems including photoresist desquamation and line narrowing are solved to achieve the special structure.
Tunable Microring Based On-Chip Interrogator for Wavelength-Modulated Optical Sensors

Ao Shen,Chen Qiu,Longzhi Yang,Tingge Dai,Yubo Li,Hui Yu,Yinlei Hao,Xiaoqing Jiang,Jianyi Yang

DOI: https://doi.org/10.1016/j.optcom.2014.11.067

IF: 2.4

2014-01-01

Optics Communications

Abstract:An interrogation system for wavelength-modulated optical sensors based on tunable microring filter has been proposed and demonstrated both theoretically and experimentally. The wavelength shift of the sensors can be readout from the shift of the peak optical output of the system by scanning the resonant wavelength of the microring filter. We fabricate the interrogator on the silicon-on-insulator platform and a fiber Bragg grating sensor (FBG) is precisely interrogated. The Lorentz spectrum of the microring filter can de-flatten the output spectrum of the FBG and improve the interrogating resolution efficiently. Such a technique potentially provides a compact (only 50×50μm2), low-cost, and high-performance (1pm resolution) approach for the interrogation of the wavelength-modulated sensor and distributed sensor arrays.
Design of a Surface Plasmon Resonance Sensor Based on Grating Connection

Jun Zhu,Liuli Qin,Shuxiang Song,Junwen Zhong,Siyuan Lin

DOI: https://doi.org/10.1007/s13320-015-0244-1

2015-01-01

Abstract:Nowdays, the study of measurement of the biological field focuses on the research of improving surface plasmon resonance (SPR) in the fields of integration and detection sensitivity. We designed a kind of grating connected surface plasmon resonance sensor. Theoretically, we analyzed the wave vector and the effective refractive index relations with the diffraction grating structure. Then we obtained the nanoparticles enhancement SPR structure with a resolution 10 times higher than that of traditional SPR sensors. Also, we used the finite-difference time-domain (FDTD) analysis and simulation which showed that it was obvious with coupling effect by the nanoparticles enhancement SPR structure that the reflectance spectral bandwidth results validated the structure significantly which improved the sensitivity. Experimental results showed that the dynamic response of the designed sensor reached 10 −6 RIU (refractive index unit). This study has the certain significance to long-distance and special sensing applications.

Investigation of a SPR Waveguide Sensor Based on Angular Interrogation

Polarization interference interrogation of angular surface plasmon resonance sensors with wide metal film thickness tolerance

A Symmetrical Optical Waveguide Based Surface Plasmon Resonance Biosensing System

A Two-Dimensional Polarization Interferometry Based Parallel Scan Angular Surface Plasmon Resonance Biosensor

Design of a High-Performance Micro Integrated Surface Plasmon Resonance Sensor Based on Silicon-On-Insulator Rib Waveguide Array

Polarization-interferometry-based Wavelength-Interrogation Surface Plasmon Resonance Imager for Analysis of Microarrays

Axial Spatial Refractive Index Distribution of Surface Plasmon Resonance Sensor Based on Multi-Wavelength Angular Interrogation Structure

A Sensitive Bi-Reflection Surface Plasmon Resonance Waveguide Sensor Based On Sion

Theoretical and Experimental Study of a Highly Sensitive SPR Biosensor Based on Au Grating and Au Film Coupling Structure

Optical Waveguide Double-Ring Sensor Using Intensity Interrogation with a Low-Cost Broadband Source

A Surface Plasmon Resonance Sensor Based on Silicon-On-Insulator Rib Waveguide

Highly-Sensitive Optical Biosensors Based on Silicon-On-Insulator Nanowire Waveguide

Intensity Interrogated Planar Waveguide Biosensors

Novel SPR Sensor Based on MIM-based Waveguide and an Asymmetric Cross-shaped Resonator

Sensitivity enhancement of surface plasmon resonance imaging sensor with structural parameter optimization based on polarization contrast modulation

Research and Optimization on Novel SPW Sensor with a High Sensitivity by Using the Double Metal Layers Structure

[Research on Symmetrical Optical Waveguide Based Surface Plasmon Resonance Sensing with Spectral Interrogation].

Silicon-on-Insulator Nanowire Based Optical Waveguide Biosensors

Design and Fabrication of a SOI Optical Waveguide Sensing Platform for Biochemical Sensor Application

Tunable Microring Based On-Chip Interrogator for Wavelength-Modulated Optical Sensors

Design of a Surface Plasmon Resonance Sensor Based on Grating Connection