Abstract:Biosensors are of great significance for human health and safety monitoring, especially the sensor based on Surface Plasmon Resonance (SPR), widely used in biomolecular detection. Improving its sensitivity has always been the focus of research. In this paper, SPR in grating structures was primarily investigated and then a SPR-based nanoscale metal grating sensor was proposed. With Finite Difference Time Domain (FDTD) simulation, optimization of the sensor's duty ratio, thickness of the Gold (Au) layer, and periodic parameters was conducted. Then sensitivity and quality factor of the sensor are analyzed to obtain the optimal sensor parameters. With a grating period of 0.64 , Au layer thickness of 30nm, and sensor's fill factor of 0.625, the sensor achieves a sensitivity of 0.417 / refractive index unit (RIU), demonstrating optimal performance. Additionally, Abaqus tensile simulations were performed on the grating imprinting section, validating the uniformity and consistency of strain in the Polydimethylsiloxane (PDMS) substrate-Au film grating structure during stretching. Finally, a combination mold based on acrylic material is designed, effectively addressing the challenging demolding characteristics of cured PDMS material, offering an efficient manufacturing approach for PDMS substrate fabrication. The SPR-based nanoscale grating multimodal sensor designed in this paper exhibits high sensitivity and potential cost-effectiveness in protein molecule detection and flexible stress-strain sensing applications, revealing promising broad prospects for practical utilization.

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