Abstract:Film stress and refractive index play an important role in the fabrication of suspended waveguides. SiO2 waveguides were successfully fabricated on multiple substrates including Si, Ge, and Al2O3 wafers; the waveguides were deposited using inductively coupled plasma chemical vapor deposition at 100 °C. The precursor gases were SiH4 and N2O at 1:3 and 1:9 ratios with variable flow rates. The occurrence of intrinsic stress was validated through the fabrication of suspended SiO2 bridges, where the curvature of the bridge corresponded to measured intrinsic stress, which measured less than 1 μm thick and up to 50 μm in length. The flow rates allow film stress tunability between 50 and −65 MPa, where a negative number indicates a compressive state of the SiO2. We also found that the gas ratios have a slight influence on the refractive index in the UV and visible range but do not affect the stress in the SiO2 bridges. To test if this method can be used to produce multi-layer devices, three layers of SiO2 bridges with air cladding between each bridge were fabricated on a silicon substrate. We concluded that a combination of low temperature deposition (100 °C) and photoresist as the sacrificial layer allows for versatile SiO2 bridge fabrication that is substrate and refractive index independent, providing a framework for future tunable waveguide fabrication.

Analysis of the Stress-Optical Effects in Silica-on-silicon Optical Waveguides

Single-mode Guiding Properties of Subwavelength-Diameter Silica and Silicon Wire Waveguides.

FINITE ELEMENT ANALYSIS OF THE DEFORMATION AND STRESS IN THE OPTICAL ELEMENT UNDER COMPLEX OPERATION CONDITIONS

Stress induced birefringence tuning in femtosecond laser fabricated waveguides in fused silica.

Experimental Demonstration of Birefringence Compensation Using Angled Star Couplers in Silica-Based Arrayed Waveguide Grating

Stress in femtosecond-laser-written waveguides in fused silica

Theoretical Research On The Strain Characteristics Of The Selective-Filling Birefringent Photonic Crystal Fiber

Birefringence compensated arrayed waveguide grating

Optical anisotropy and strain-induced birefringence in dislocation-free silicon single crystals

Light Transmission in Thermal Stress-Induced Birefringent Medium

Study on Properties of Silicon Nano-Slab Waveguides

Design and Simulation of Temperature-Insensitive Arrayed Waveguide Gratings Based on Silicon Nanowires

Strain/Stress-Engineering in Phonon Properties of Streesed Semiconductor Nanowires

Stress and Refractive Index Control of SiO2 Thin Films for Suspended Waveguides

Microscopic observation of strain induced in heteroepitaxial layers with reflection type of infrared polariscope

Uniform Polarization-Dispersion Compensation of All Channels in Highly Birefringent Silicon Nanowire-Based Arrayed Waveguide Grating

Electro-Optic Effect Induced by Thermal Poling in Sio2 Ridge Waveguides

Polarimetric analysis of stress anisotropy in nanomechanical silicon nitride resonators

Numerical Investigation of Stress-Strain State Effects on Strain Measurements with Fiber Bragg Grating Sensors

Design and analysis of an optical planar waveguide using Invar as core and silicon nitride as cladding layer to control birefringence

Analysis of the Birefringence of A Silicon-On-Insulator Rib Waveguide