Structural Control of Porous Silica Thin Films under Alkaline Condition

PENG Hua,XIA Zhi-lin,XUE Yi-yu,GUO Pei-tao,FU Zhi-wei,ZHAO Li-xin

2010-01-01

Abstract:Porous silica film was prepared through sol-gel process and impregnation method with a precursor sol containing of tetraethoxysilane(TEOS) in base catalyst. The influence of the content of anamoni on the performance of the SiO2 sol and coating was studied in detail. Thermal stability in drying process of the SiO2 sol were studied by Netzsch thermal analyzer;the structure and morphology of these samples were characterized by SEM;the optical properties of porous silicon thin film were studied by spectrophotometer. It's found that the viscosity of silicon sol was impervious to the increase of the NH3/TEOS molar ratio, whereas its optimal time for coating was shortened;by increasing the content of anamonia, the size of SiO2 particles increases. Doping organic additive N, N-DMF can improve the performance of the film, effectively control the growth of particles. The SiO2 sol catalyzed by NH3 had the high transmittance, which the peak value are all above 99% between 640-690nm.