Effect of Au Buffer Layer on the Structure of ZnO Films Grown on Quartz Substrate

Ning LI,Jin-ju CHEN,Hong DENG
2010-01-01
Abstract:Taking [Zn4(OH)2 (O2CCH3)6 ·2H2O] as solid sources, ZnO thin films were deposited on quartz and gold-plated quartz substrates by SSCVD technique at normal pressure. The structure and morpho-logy of the samples was characterized by scanning electron microscope (SEM) and X-ray diffraction (XRD), respectively, while the optical properties were estimated by photoluminescence(PL) spectra. The results showed that the ZnO thin films with Au buffer layer is of high crystallinic qualities and is highly c-axis oriented. The prepared ZnO thin films on gold-plated quartz substrates at 500 °C are found to be compact and uniform, with better crystallinic qualities. A strong band edge emission in the PL spectra associated with the free exciton emission is observed at about 400 nm, while other emissions related to specific defects could be negligible compared with the intensive UV emission, which indicated that the ZnO thin films has low concentration of defects and high crystal qualities.
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