Simulation Algorithm and Automated Mask Generation of SAW Delay Lines

Haofeng LI,Rui JIA,Dongmei LI,Ming LIU,Weilong LI,Chen CHEN,Chenxin ZHU
DOI: https://doi.org/10.3969/j.issn.1004-2474.2010.05.003
2010-01-01
Abstract:A platform for simulation of SPUDT SAW delay lines was designed and analyzed by MATLAB. This transducer could be considered as the networks of connection of some units of IDTs and the loss of device could be therefore effectively reduced. Based on the Coupling of Modes (COM) theory and equivalent circuit modal, the mixed matrix(P matrix) of the transducers was deduced, and further, the response of the delay lines could be obtained. User-friendly interface was also made by MATLAB in which the designer could adjust parameters and generate the hard mask of the fingers for photolithograph. The theoretical simulation is found to agree with the experimental results.
What problem does this paper attempt to address?