Residence Time Statistics for Normal and Fractional Diffusion in a Force Field

Eli Barkai

DOI: https://doi.org/10.1007/s10955-006-9109-8

2006-01-08

Abstract:We investigate statistics of occupation times for an over-damped Brownian particle in an external force field. A backward Fokker-Planck equation introduced by Majumdar and Comtet describing the distribution of occupation times is solved. The solution gives a general relation between occupation time statistics and probability currents which are found from solutions of the corresponding problem of first passage time. This general relationship between occupation times and first passage times, is valid for normal Markovian diffusion and for non-Markovian sub-diffusion, the latter modeled using the fractional Fokker-Planck equation. For binding potential fields we find in the long time limit ergodic behavior for normal diffusion, while for the fractional framework weak ergodicity breaking is found, in agreement with previous results of Bel and Barkai on the continuous time random walk on a lattice. For non-binding potential rich physical behaviors are obtained, and classification of occupation time statistics is made possible according to whether or not the underlying random walk is recurrent and the averaged first return time to the origin is finite. Our work establishes a link between fractional calculus and ergodicity breaking.

Statistical Mechanics

What problem does this paper attempt to address?

The problem that this paper attempts to solve is: in modern lithography technology, how to efficiently and accurately simulate the light propagation problem of phase - shift masks. With the development of semiconductor processes, the demand for strict three - dimensional lithography simulation is increasing day by day, especially when dealing with alternating and attenuated phase - shift masks. Existing simulation methods still face challenges in terms of calculation time and result accuracy. Therefore, this paper aims to evaluate a Maxwell equation solver based on the frequency - domain finite - element method (FEM) to verify its applicability and superiority in mask simulation.

Specifically, the paper solves the problem through the following aspects:

1. **Improving Computational Efficiency and Accuracy**:
- The paper introduces a fast time - harmonic finite - element solver for photonic crystal transmission analysis and applies it to the mask simulation problem.
- This method is 100 times faster than existing methods under medium - precision targets and is the only method that can operate effectively under high - precision targets.

2. **Benchmark Testing**:
- To verify the effectiveness of the new method, the paper benchmarks it against two established methods (FDTD and the differential method) and an analytical example.
- The tests include typical mask simulation problems, such as the conical incident light scattering of periodic line masks, the polarization degree scanning under different geometric parameters, etc.

3. **Adaptive Mesh Refinement**:
- The adaptive mesh refinement strategy is studied to improve the simulation accuracy and convergence speed of complex geometric structures (such as beveled profiles).

4. **Full Three - Dimensional Simulation**:
- A complete three - dimensional simulation is carried out, for example, the light transmission through a mask with a periodic three - dimensional pattern, demonstrating the application ability of this method in complex three - dimensional structures.

5. **Comparison with Other Methods**:
- A detailed comparison of three different strict simulation methods (FEM, FDTD, and the waveguide method) is carried out, and their convergence speeds and calculation times under different polarization modes are evaluated.

Through these studies, the paper proves the efficiency and accuracy of the solver based on the frequency - domain finite - element method in mask simulation, providing new tools and methods for future lithography simulations.

### Formula Summary
The formulas involved in the paper are as follows:

- Wave equation and divergence condition of Maxwell equations:
\[
\nabla\times\left(\frac{1}{\varepsilon(\vec{x})}\nabla\times H(\vec{x})\right)-\omega^{2}\mu(\vec{x})H(\vec{x}) = 0,\quad\vec{x}\in\Omega,
\]
\[
\nabla\cdot\left(\mu(\vec{x})H(\vec{x})\right)=0,\quad\vec{x}\in\Omega.
\]

- Transparent boundary condition:
\[
\left(\frac{1}{\varepsilon(\vec{x})}\nabla\times(H - H_{\text{in}})\right)\times\vec{n}=D_{tN}(H - H_{\text{in}}),\quad\vec{x}\in\partial\Omega.
\]

- Periodic boundary condition (given by Bloch theorem):
\[
H(\vec{x})=e^{i\vec{k}\cdot\vec{x}}u(\vec{x}),\quad u(\vec{x})=u(\vec{x}+\vec{a}),
\]
where the Bloch wave vector \(\vec{k}\in\mathbb{R}^{3}\) is defined by the incident plane wave \(H_{\text{in}}\).

These formulas ensure the accurate modeling and solution of the light propagation problem.