A Low Voltage Driven Digital-Droplet-Transporting-Chip by Electrostatic Force

Gao An-Ran,Liu Xiang,Gao Xiu-Li,Li Tie,Gao Hua-Min,Zhou Ping,Wang Yue-Lin
DOI: https://doi.org/10.1088/0256-307x/28/8/084706
2010-01-01
Abstract:In this paper,an electrostatic force based digital microfluidic chip was designed and fabricated. Optimization of the chip structure by employing silicon wafer substrate,TiW/Au electrodes,thin silicon nitride dielectric layer and fluorocarbon polymer hydrophobic layer decreases the driving voltage dramatically. Deionized water droplets were successfully transported in two-dimension on this chip under only 30V with transported velocity of 96mm/s. 0.9% of sodium chloride mass fraction solution droplets were also successfully transported on this chip. Further investigation confirmed that electrostatic force is the driving force of the droplets.
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