Novel Open-Structure Droplets Actuating Chip

Jian-gang WU,Rui-feng YUE,Xue-feng ZENG,Li-tian LIU
DOI: https://doi.org/10.3969/j.issn.1005-9490.2005.04.001
2005-01-01
Abstract:A novel open-structure discrete droplets actuation based on Electrowetting-on-dielectric is presented, consisting of heavy doped poly-silicon used as the microelectrode array, the complex layer of the SiO_2 film and the fluorocarbon polymer film as the hydrophobic dielectric layer, the suspended silicon-aluminum line as the ground electrode. By controlling the sequence of voltage pulses applied to the microelectrode array under the dielectric layer, droplets on the surface of the hydrophobic layer could be manipulated. Owing to the suspended-line structure, the transportation of droplet was successfully achieved in air by applying the voltage pulse of 40V.
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