Study on Dispenser of Liquid Droplets Based on Electrowetting-on-Dielectric

YUE Rui-feng,WU Jian-gang,ZENG Xue-feng,KANG Ming,LIU Li-tian
DOI: https://doi.org/10.3969/j.issn.1005-9490.2007.01.011
2007-01-01
Abstract:According to the fundamental theory of Electrowetting-on-Dielectric (EWOD), the factors that affect transportation and creation of droplet of liquid in Sandwich-structure devices for digital microfluidic systems have been theoretically analyzed, and a novel dispenser of droplets of liquid has been developed in which the liquid is sandwiched between the top and bottom plates. For the bottom plate, silicon is used as the substrate, the heavily phosphorus-doped polysilicon deposited by LPCVD (Low pressure chemical vapor deposition) as the microelectrode array, and thermally grown SiO_2 film as the dielectric layer;the top plate is a glass plate covered with transparent ITO as the ground electrode;a Teflon~ AF1600 film of 30nm is spun on the surface of both plates as the hydrophobic layers. The experimental results show the prototype of the dispenser can dispense droplets of DI water from reservoir at 10 Hz 70 V applied voltage.
What problem does this paper attempt to address?