Actuation and Control of Droplets by Using Electrowetting-on-Dielectric

XF Zeng,RF Yue,JG Wu,L Dong,LT Liu
DOI: https://doi.org/10.1088/0256-307x/21/9/050
2004-01-01
Chinese Physics Letters
Abstract:Electrowetting-on-dielectric (EWOD) controls directly the wettability of liquids on the solid surface by applying an electric potential to the microelectrode array under the dielectric layer. A prototype of the EWOD droplet actuator is put forward, consisting of Si used as the substrate of the microelectrode array, Si3N4 film as the dielectric layer and fluorocarbon polymer (p-C:F) film deposited by plasma enhanced chemical vapour deposition (PECVD) as the hydrophobic layer. The p-C:F film was uniform and compact, and the contact angle of deionized water on the p-C:F film reached 110°. The actuator successfully actuated deionized droplets surrounded in silicone oil at the voltage of 35 V.
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