Abstract:Photonic integrated circuits based on Lithium Niobate have demonstrated the vast capabilities afforded by material with a high Pockels coefficient, allowing linear and high-speed modulators operating at CMOS voltage levels for applications ranging from data-center communications and photonic accelerators for AI. However despite major progress, the industrial adoption of this technology is compounded by the high cost per wafer. Here we overcome this challenge and demonstrate a photonic platform that satisfies the dichotomy of allowing scalable manufacturing at low cost, while at the same time exhibiting equal, and superior properties to those of Lithium Niobate. We demonstrate that it is possible to manufacture low loss photonic integrated circuits using Lithium Tantalate, a material that is already commercially adopted for acoustic filters in 5G and 6G. We show that LiTaO3 posses equally attractive optical properties and can be etched with high precision and negligible residues using DUV lithography, diamond like carbon (DLC) as a hard mask and alkaline wet etching. Using this approach we demonstrate microresonators with an intrinsic cavity linewidth of 26.8 MHz, corresponding to a linear loss of 5.6 dB/m and demonstrate a Mach Zehnder modulator with Vpi L = 4.2 V cm half-wave voltage length product. In comparison to Lithium Niobate, the photonic integrated circuits based on LiTaO3 exhibit a much lower birefringence, allowing high-density circuits and broadband operation over all telecommunication bands (O to L band), exhibit higher photorefractive damage threshold, and lower microwave loss tangent. Moreover, we show that the platform supports generation of soliton microcombs in X-Cut LiTaO3 racetrack microresonator with electronically detectable repetition rate, i.e. 30.1 GHz.

Fabrication of Homogenous Periodically Poled Stoichiometric Lithium Tantalate Wafer

Periodic poling of thin-film lithium tantalate by applying a high-voltage electric field

532 nm pumped optical parametric oscillator using periodically-poled stoichiometric LiTaO3

Efficient Periodically Poled Stoichiometric Lithium Tantalate Optical Parametric Oscillator for the Visible to Near-Infrared Region.

Fabrication of a lithium tantalate temperature-stabilized optical modulator

Etching Study of Poled Lithium Tantalate Crystal Using Wet Etching Technique with Ultrasonic Assistance

Widely-tunable Mid-infrared Optical Parametric Oscillation in High-Q Periodically Poled Lithium Tantalate Whispering Gallery Mode Resonators

Experimental Realization of Broadband Parametric Generation in a Quasi-Periodically Poled LiTaO_3

Lithium tantalate electro-optical photonic integrated circuits for high volume manufacturing

LiTaO3 Crystal Periodically Poled by Applying an External Pulsed Field

Subnanosecond, mid-IR, 0.5 kHz periodically poled stoichiometric LiTaO3 optical parametric oscillator with over 1 W average power

Widely Tunable Optical Parametric Oscillator in Periodically Poled Congruently Grown Lithium Tantalite Whispering Gallery Mode Resonators

Control of VO•• ∼ TiTi′ Dipole Pairs As Well As MgTi″ Defects on Dielectric Properties of Mg Doped (pb0.35sr0.65)tio3 Thin Film

Fabrication of LiTaO3 periodic surface structures by a single excimer laser pulse through a phase mask grating

Tuning Visible Light Generation Based on Multi-Channel Quasi-Periodically Poled LiTaO3

Growth of ferroelectric lithium niobate-tantalate LiNb(1-x)TaxO3 crystals

Green-pumped high-power optical parametric oscillator based on periodically poled MgO-doped stoichiometric LiTaO3.

Tunable and stable micro-ring resonator based on thin-film lithium tantalate

Study of LiTa03 Crystals Grown with a Modulated Structure I. Second Harmonic Generation in LiTa03 Crystals with Periodic Laminar Ferroelectric Domains

Surface-near domain engineering in multi-domain x-cut lithium niobate tantalate mixed crystals

Erbium-Ytterbium Co-doped Tantalum Pentoxide As a Gain Material for Silicon-based Optoelectronics