Study on the Mechanical Behavior of Laser Micro-Adjustment of Two-Bridge Actuators

Hong Shen,Linfa Peng,Jun Hu,Zhenqiang Yao
DOI: https://doi.org/10.1088/0960-1317/20/11/115010
2010-01-01
Journal of Micromechanics and Microengineering
Abstract:Laser micro-adjustment is an application of laser forming for the adjustment of micro-, fiber- and electro-optical systems. Experience has shown that conventional material models cannot properly describe the micro- scale deformation behavior due to size effects. As a result, traditional macro-scale laser forming is not suitable for the micro- scale laser forming process. In this study, the mechanical behavior of two-bridge actuators in laser micro- adjustment is investigated under the condition of geometrically scaled actuators. Numerical simulation is conducted by using a material model that takes into account the size effects. Simulation results obtained for cases with and without consideration of the size effects are compared, showing that size effects have a significant influence on the laser forming of micro- adjustment. The results with consideration of the size effects are found to agree well with the experimental data.
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