Displacement Measurement by Single-Grating Heterodyne Interferometry

Guochao Wang,Xuedong Xie,Shuhua Yan

DOI: https://doi.org/10.1109/cleopr.2015.7376014

2010-01-01

Abstract:We presented a displacement measurement system based on single-grating heterodyne interferometry. Our prototype system was demonstrated to achieve a relative measurement accuracy of better than 69 nm with standard deviations of less than 28 nm.

What problem does this paper attempt to address?

A High-Resolution Displacement Sensor Based on a Grating Interferometer with the Phase Modulation Technique

Shuangshuang Zhao,Changlun Hou,Juan Zhang,Jian Bai,Guoguang Yang

DOI: https://doi.org/10.1088/0957-0233/23/10/105102

IF: 2.398

2012-01-01

Measurement Science and Technology

Abstract:A high-resolution displacement sensor based on a grating interferometer with the phase modulation technique is demonstrated in this paper. The grating interferometer is formed with a grating and a mirror, which is fixed on a piezoelectric translator to generate phase modulation. The detected signal is intensity-modulated and processed with a lock-in amplifier for demodulation. Experimental results show that this displacement sensor has a displacement sensitivity of 19.8 mV nm(-1) and a high-resolution displacement detection of 0.05 nm in the linear region.
High-precision 2D grating displacement measurement system based on double-spatial heterodyne optical path interleaving

Yunfei Yin,Zhaowu Liu,Shan Jiang,Wei Wang,Hongzhu Yu,Galantu Jiri,Qun Hao,Wenhao Li

DOI: https://doi.org/10.1016/j.optlaseng.2022.107167

IF: 5.666

2022-11-01

Optics and Lasers in Engineering

Abstract:We propose a high-precision 2D grating displacement measurement system based on double-spatial heterodyne optical path interleaving. The system is based on Doppler-steering interferometry of 2D gratings, heterodyne interferometry, and double-spatial element-staggered configuration. We obtain long-stroke and high-precision real-time 2D displacement information using the optical phase change and interference signal decoupling caused by the 2D grating. The system is tested experimentally and compared with a laser interferometer, and found to have a measurement resolution within 3 nm. The error within a measurement of 40 mm is better than ±175 nm and ±150 nm in the 2D grating directions. The design is then optimized and tested, and the resulting error within the 40-mm range is better than +50 nm and −40 nm in the X-direction and +100 nm and −80 nm in the Y-direction. The results show that the proposed configuration improves the accuracy of the measurement system, is suitable for engineering testing, and has the potential for further improvement.

optics
Nanometer-scale Displacement Sensor Based on Phase-Sensitive Diffraction Grating.

Shuangshuang Zhao,Changlun Hou,Jian Bai,Guoguang Yang,Feng Tian

DOI: https://doi.org/10.1364/ao.50.001413

IF: 1.9

2011-01-01

Applied Optics

Abstract:In this paper, a nanometer-scale displacement sensor based on a phase-sensitive diffraction grating with interferometeric detection is described and experimentally demonstrated. The proposed displacement sensor consists of a coherent light source, a microstepping motor controller, an integrated grating, a mirror, and a differential circuit. Experimental results show that the displacement sensor has a sensitivity of about 6 mV/nm and a resolution of less than 1 nm. This displacement measurement is an attractive technology with high sensitivity, broad dynamic range, good reliability, and immunity to electromagnetic interference.
A Two-Color Heterodyne Interferometer Based on Diffraction Grating for Displacement Measurement

G. H. Wu,Z. J. Cai,Li Jiang Zeng

DOI: https://doi.org/10.4028/www.scientific.net/KEM.295-296.189

2005-01-01

Key Engineering Materials

Abstract:A two-color heterodyne interferometer based on the movement of the optical diffraction grating is proposed. The method allows us to measure the phase of synthetic wavelength A directly and with high accuracy to extend the range of unambiguity for interferometric measurements by using two close wavelengths. Our experiment results show that the uncertainty in displacement measurement caused by the uncertainty in phi(s) is 0.20 mu m, smaller than the half of a single wavelength we used. The fringe order of a single wavelength can be determined without ambiguity. The uncertainty in displacement measurement can be improved further by using a single wavelength.
An Interference Signal Processing Method for Displacement Measurement by Dual Wavelength and Single Grating

Guochao Wang,Shuhua Yan,Dongxing Yang,Weihong Zhou,Xuedong Xie

DOI: https://doi.org/10.1117/12.904076

2011-01-01

Abstract:Displacement measurement by dual wavelength and single grating integrates the single grating diffraction theory and the heterodyne interference theory. By taking advantage of the two theories, it solves the contradiction between large range and high precision in grating displacement measurement quite well. In order to obtain nanometer resolution and nanometer precision, high-power subdivision of interference fringe must be realized accurately. According to phase demodulation theory for heterodyne interference signal, a digital phase measuring method is proposed by combining frequency-mixing technique and pulse-filling method. The whole signal processing part, which is based on FPGA and PLL, has been designed to realize the integer period measurement and high-powered subdivision of the decimal phase. Through experiments, it is validated that the phase range is [-180 degrees, 180 degrees], and the phase measurement resolution and the phase precision are above 0.03 degrees and 0.1 degrees, respectively. Moreover, the displacement measurement resolution and the displacement precision, corresponding to the phase indexes, are 0.167nm and 0.556nm, respectively.
Subnanometer Resolution Displacement Sensor Based on a Grating Interferometric Cavity with Intensity Compensation and Phase Modulation

Qianbo Lu,Chen Wang,Jian Bai,Kaiwei Wang,Wenxiu Lian,Shuqi Lou,Xufen Jiao,Guoguang Yang

DOI: https://doi.org/10.1364/ao.54.004188

IF: 1.9

2015-01-01

Applied Optics

Abstract:A subnanometer resolution displacement sensor based on a grating interferometric cavity with intensity compensation and phase modulation is proposed and experimentally demonstrated in this paper. The grating interferometric cavity is composed of a frequency-stabilized laser source, a diffraction grating, and a mirror. To realize a subnanometer resolution, the intensity compensation and phase modulation technique are introduced, which are achieved by an intensity compensation light path, three closed placed photodetectors, a processing circuit and a piezoelectric ceramic transducer, and a lock-in amplifier. The intensity compensation technique can improve the stability of the output intensity signal greatly while the phase modulation technique can increase the signal-to-noise ratio dramatically. The detected signal is intensity modulated and processed by a particular arithmetic circuit. Experimental results indicate that the sensitivity of this displacement sensor is 44.75 mV/nm and the highest resolution can reach 0.017 nm, which is 27 times better than the one without intensity compensation and phase modulation. As a high-performance sensor with immunity to electromagnetic interference, this displacement sensor has potential to be used in nanoscience and technology.
Grating Interferometry with High Optical Subdivision

Shiyao Zhu,Changhe Zhou,Minkang Li,Chunlong Wei,Junjie Yu

DOI: https://doi.org/10.1117/12.2500576

2018-01-01

Abstract:In this paper, we propose a high-density grating interferometry system, which can be applied to measure displacement on the nanometer precision. We make use of the optical subdivision module to improve the measurement resolution which is better than the traditional one. The core part of the whole system is a grating with high-density of 1780 lines/mm and long-range of 100mm*100mm. The apparatus adopts a symmetrical structure to reduce the error resulting from environmental disturbance. The system provides a novel measurement technique to improve the grating interferometry. The experimental results show that the grating interferometer system has good stability, and the in-situ measurement error is within +/- 5 nm for a long time. The grating interferometer can measure the short distance displacement of 30 nm and can control the error within +/- 2 nm. The measurement of the distance of 10 mm can control the error within +/- 20 nm. The results proves the feasibility of our proposed improved.
Development of Displacement Measurement Technologies Based on Grating Interferometry

王国超,颜树华,高雷,谢学东,田震

DOI: https://doi.org/10.3969/j.issn.1001-3806.2010.05.023

2010-01-01

Abstract:Methods of displacement measurement based on grating intefferometry,including classical dual-grating measurement systems,nonsymmetrical doubly blazed reference grating measurement systems,single grating measurement systems,grating measurement systems based on the 2nd harmonic Moire fringes,concentric-circle grating two-dimension displacement measurement systems,and the two-dimension grating measurement systems,were introduced.The key problems and disadvantages of each system were presented as well.According to dual-frequency laser interferometer,the dual-wavelength single grating nanometer displacement measurement was put forth based on the single grating measurement system.After analyzing its characteristics,it was pointed out that it could realize the measurement with a wide range,nanometer precision and nanometer resolution.After a general comparison among these methods,a conclusion of key technologies was drawn,and an outlook of displacement measurement based on grating interferometry was presented.
Displacement Measurement Method Based on Integrated Grating Interferometry with Two-Wavelength Lasers

CHEN Feng,YE Xiong-ying,WU Kang,FENG Jin-yang

DOI: https://doi.org/10.3788/ope.20122011.2433

2012-01-01

Abstract:A displacement detection method based on two-wavelength grating interferometry was presented.A measurement experiment was carried out by using an integrated grating sensor chip fabricated by silicon-glass bonding bulk process.The measurement setup consisted of a sensor chip,two lasers with wavelengths of 640 nm and 660 nm,two photodetectors and a data acquisition circuit.The sensor chip included moving parts with a reflective surface and a metal grating on the transparent substrate.In experiment,the laser beam illuminated the grating and the grating reflected the laser beam to form a diffraction pattern.As the intensity of the diffracted beams changed according to the displacement between movable structure and substrate,the displacement could be determined with an extended range than single wavelength and the absolute position could be obtained by measuring intensity signals of the two wavelengths respectively.Experimental results show that the initial gap between the moving part and the substrate is about 7.522 μm measured by proposed method and it can implement the displacement measurement in a range of 618 nm with a resolution of 0.2 nm.
Compact Grating Displacement Measurement System with a 3 \times 3 Coupler

Chunhua Wei,Shuhua Yan,Cunbao Lin,Zhiguang Du,Guochao Wang

DOI: https://doi.org/10.3788/col201513.051301

IF: 2.56

2015-01-01

Chinese Optics Letters

Abstract:We present a compact displacement measurement system possessing the capability of nanometer-scale precision. On basis of integrating single grating with 3 x 3 coupler for phase shift in interference signal, the present scheme features advantages of simple structure, convenient alignment, and insensitivity to air turbulence. Linear comparisons between our system and HP5530 show a residual error less than 81 nm during step motions along a 10 mm round-trip, and a discrepancy less than 15 nm in the case of 200 mu m movement. We also demonstrate a measurement stability test in a duration of 300 s, which shows the proposed scheme potentially performs better than HP5530 in terms of long-term stability.
A Displacement Measuring System Based on Grating Double Diffraction

Bo Zhao,Lei Wang,Mi-er Xu,Hong Zhao,Xiang-dong Liu

DOI: https://doi.org/10.1117/12.2182024

2015-01-01

Abstract:A displacement measuring system based on grating double diffraction is proposed in this paper to eliminate the impact of multiple reflections of the zero-order diffraction beam and to reduce the stray light coming from the interference field. The principle of the proposed system is that with the proper interference of the first order beam of second diffraction, a displacement transducer can be obtained via the Doppler frequency shift and phase decodi ng. Simulation tests are conducted using LightTools model to prove the effectiveness of the proposed system. And experiment results shows that a resolution of 20 nm can be achieved over a range of 25 mm. It is therefore concluded that the proposed system can be used to improve the measurement resolution and accuracy.
An ultracompact high-resolution displacement sensor based on self-interference effect of single optical nanograting

Jie Qi,Chenguang Xin

DOI: https://doi.org/10.1117/12.2600368

2021-01-01

Abstract:Benefitting from properties including high sensitivity, high resolution, immunity to electromagnetic interference and remote sensing ability, optical-grating-based displacement measuring technologies have been widely used in many fields such as semiconductor manufacturing, precision machining, microscopic techniques and photolithography recently. In this work, high-resolution displacement measuring is demonstrated with an ultracompact structure consist of only a few optical components by using self-interference effect of a single nanograting. The resolution is demonstrated to be as low as 0.1-nm level. This method shows great potential in developing miniaturized high-resolution displacement devices and systems, which are highly demanded for future integrated high-precision machinery manufacturing systems.
Research for Wide Range and High Resolution Displacement Measurement with Grating

HB Lu,JL Cao,JY Chen

DOI: https://doi.org/10.1117/12.403902

2000-01-01

Abstract:A new method of displacement measurement using single grating is put forward in the paper. Wide range and high-resolution displacement measurement is realized by means of a general coarse metric-grating and a spectroscope. The method solves the traditional problem that high frequency grating can't be manufactured too long. The optical configuration and the principle of measurement are presented in the paper. Its feasibility is proved by experiment. In the experiment, a metric-grating with frequency of 50 rulings/mm is used and optical subdivision more than 32 is received.
Spatially Separated Heterodyne Grating Interferometer for In-Plane and Out-of-Plane Displacement Measurements

Di Chang,Ziqi Yin,Yunke Sun,Pengcheng Hu,Jiubin Tan,Zhigang Fan

DOI: https://doi.org/10.3390/photonics9110830

IF: 2.536

2022-01-01

Photonics

Abstract:Grating interferometers that measure in-plane and out-of-plane displacements are not only effective two-degree-of-freedom (DOF) sensors, but are also basic units of six-DOF measurement systems. Besides resolution and accuracy, periodic nonlinear errors, misalignment tolerance, and size of reading heads are more crucial than ever. In this work, a spatially separated heterodyne grating interferometer that measures in- and out-of-plane displacements is proposed. A prototype with 3 mm diameter beams with a size of 69 mm x 51 mm x 41 mm was built and tested. The experiment results show that the 30 s stability is 2.5 nm; the periodic nonlinear errors of the two measuring directions are less than the resolutions (0.25 nm for in-plane motions and 0.15 nm for out-of-plane motions). Double-diffracted configuration ensures that the misalignment tolerances are three axes larger than +/- 2 mrad.
Two-dimensional Diagonal-Based Heterodyne Grating Interferometer with Enhanced Signal-to-noise Ratio and Optical Subdivision

Cunbao Lin,Shuhua Yan,Dan Ding,Guochao Wang

DOI: https://doi.org/10.1117/1.oe.57.6.064102

IF: 1.3

2018-01-01

Optical Engineering

Abstract:A diagonal-based heterodyne grating interferometer (HGI) for two-dimensional displacement measurement is presented. It can simultaneously realize the high signal contrast and signal-to-noise ratio (SNR) with the specially designed cross grating. Meanwhile, an eightfold optical subdivision can be acquired with the proposed phase decoupling method. The signal contrast of 96.55% and SNR of 50 dB are obtained with laser power of 0.45 mW. Several tests including linear displacement, planar displacement, and stability are conducted in the experiments. The theoretical resolution of 0.125 nm, the short-range repeatability of 2.35 and 3.24 nm under round-trip movement of 10 mu m, and the system stability better than +/- 4 and +/- 6 nm over 10 min are achieved for the X- and Y-directions, respectively. In addition, the measurement errors including geometric, nonlinear, and noncommon-path errors are analyzed. The results demonstrate that the proposed diagonal-based configuration combined with cross gratings is extremely suitable for HGIs, which has the potential to simultaneously improve the performance and practicability of HGIs. (C) 2018 Society of Photo-Optical Instrumentation Engineers (SPIE)
Dynamic Tracking Down-Conversion Signal Processing Method Based on Reference Signal for Grating Heterodyne Interferometer

Guochao Wang,Shuhua Yan,Weihong Zhou,Chenhui Gu

DOI: https://doi.org/10.1117/1.oe.51.8.081512

IF: 1.3

2012-01-01

Optical Engineering

Abstract:Traditional displacement measurement systems by grating, which purely make use of fringe intensity to implement fringe count and subdivision, have rigid demands for signal quality and measurement condition, so they are not easy to realize measurement with nanometer precision. Displacement measurement with the dual-wavelength and single-grating design takes advantage of the single grating diffraction theory and the heterodyne interference theory, solving quite well the contradiction between large range and high precision in grating displacement measurement. To obtain nanometer resolution and nanometer precision, high-power subdivision of interference fringes must be realized accurately. A dynamic tracking down-conversion signal processing method based on the reference signal is proposed. Accordingly, a digital phase measurement module to realize high-power subdivision on field programmable gate array (FPGA) was designed, as well as a dynamic tracking down-conversion module using phase-locked loop (PLL). Experiments validated that a carrier signal after down-conversion can constantly maintain close to 100 kHz, and the phase-measurement resolution and phase precision are more than 0.05 and 0.2 deg, respectively. The displacement resolution and the displacement precision, corresponding to the phase results, are 0.139 and 0.556 nm, respectively. (C) 2012 Society of Photo-Optical Instrumentation Engineers (SPIE). [DOI: 10.1117/1.OE.51.8.081512]
A Displacement Measurement System, Utilizing a Wollaston Interferometer

J Kemp,XQ Jiang,YN Ning,AW Palmer,KTV Grattan

DOI: https://doi.org/10.1016/s0030-3992(98)00008-5

1998-01-01

Abstract:A dual interferometric displacement measurement system is presented where a Wollaston prism interferometer is employed in conjunction with a normal Michelson interferometer. The system operates without the use of external polarizers, apart from those associated with the Wollaston prism interferometer itself. It is shown that an optical path difference induced in the Michelson interferometer can be detected using the Wollaston prism in a normal interferometer arrangement. Further, the interference pattern produced by the Wollaston prism interferometer changes in a measurable, linear fashion as the optical path difference from the Michelson interferometer alters. A simple theoretical analysis of the system is presented and used to derive a computer model of the optical arrangement. Results from an experimental implementation of the system, using a Wollaston prism with a beam separation of 0.5 degrees and a superluminescent diode, of wavelength 825nm, as a light source, are included and compared to the results from the computer model.
Displacement Measuring Grating Interferometer: a Review

Peng-cheng HU,Di CHANG,Jiu-bin TAN,Rui-tao YANG,Hong-xing YANG,Hai-jin FU

DOI: https://doi.org/10.1631/fitee.1800708

IF: 2.526

2019-01-01

Frontiers of Information Technology & Electronic Engineering

Abstract:A grating interferometer, called the “optical encoder,” is a commonly used tool for precise displacement measurements. In contrast to a laser interferometer, a grating interferometer is insensitive to the air refractive index and can be easily applied to multi-degree-of-freedom measurements, which has made it an extensively researched and widely used device. Classified based on the measuring principle and optical configuration, a grating interferometer experiences three distinct stages of development: homodyne, heterodyne, and spatially separated heterodyne. Compared with the former two, the spatially separated heterodyne grating interferometer could achieve a better resolution with a feature of eliminating periodic nonlinear errors. Meanwhile, numerous structures of grating interferometers with a high optical fold factor, a large measurement range, good usability, and multidegree-of-freedom measurements have been investigated. The development of incremental displacement measuring grating interferometers achieved in recent years is summarized in detail, and studies on error analysis of a grating interferometer are briefly introduced.
A Fiber-Based Chromatic Dispersion Probe for Simultaneous Measurement of Dual-Axis Absolute and Relative Displacement

Ran Zhao,Chong Chen,Xin Xiong,Yuanliu Chen,Bingfeng Ju

DOI: https://doi.org/10.3390/s22249906

IF: 2.398

2024-01-01

Measurement Science and Technology

Abstract:This paper presents a fiber-based chromatic dispersion probe for the simultaneous measurement of dual-axis absolute and relative displacement with nanometric resolutions. The proposed chromatic dispersion probe is based on optical dispersion. In the probe, the employed light beam is split into two sub-beams, and then the two sub-beams are made to pass through two optical paths with different optical settings where two identical single-mode fiber detectors are located at different defocused positions of the respective dispersive lenses. In this way, two spectral signals can be obtained to indicate the absolute displacement of each of the dual-axes. A signal processing algorithm is proposed to generate a normalized output wavelength that indicates the relative displacement of the dual-axis. With the proposed chromatic dispersion probe, the absolute and relative displacement measurements of the dual-axis can be realized simultaneously. Theoretical and experimental investigations reveal that the developed chromatic dispersion probe realizes an absolute measurement range and a measurement resolution of approximately 180 μm and 50 nm, respectively, for each axis. Moreover, a relative displacement measurement range and a measurement resolution of about 240 μm and 100 nm, respectively, are achieved for the dual-axis.
High-precision Microdisplacement Sensor Based on Zeroth-Order Diffraction Using a Single-Layer Optical Grating.

Hongbo Zhao,Mengwei Li,Rui Zhang,Zhibin Wang,Kunyang Xie,Chenguang Xin,Li Jin,Zhouxin Liang

DOI: https://doi.org/10.1364/ao.59.000016

IF: 1.9

2019-01-01

Applied Optics

Abstract:A high-precision microdisplacement sensor based on zeroth-order diffraction of a single-layer optical grating is reported. Laser grating interference occurs when part of the laser is reflected diffraction by the grating and another part is vertically reflected back by a mirror and diffracted again by the grating, thus generating optical interferometric detection. For the purpose of obtaining the optimal contrast of the optical interferometric detection, the duty cycle of the grating and the orders of diffraction were optimized by the diffraction scalar theory. The microdisplacement sensor demonstrates a sensitivity of 0.40%/nm, a resolution of 0.6 nm, and a full-scale range of up to 100 µm. This work enables a high-performance displacement sensor, and provides a theoretical and technical basis for the design of a displacement sensor with an ultracompact structure.

Displacement Measurement by Single-Grating Heterodyne Interferometry

A High-Resolution Displacement Sensor Based on a Grating Interferometer with the Phase Modulation Technique

High-precision 2D grating displacement measurement system based on double-spatial heterodyne optical path interleaving

Nanometer-scale Displacement Sensor Based on Phase-Sensitive Diffraction Grating.

A Two-Color Heterodyne Interferometer Based on Diffraction Grating for Displacement Measurement

An Interference Signal Processing Method for Displacement Measurement by Dual Wavelength and Single Grating

Subnanometer Resolution Displacement Sensor Based on a Grating Interferometric Cavity with Intensity Compensation and Phase Modulation

Grating Interferometry with High Optical Subdivision

Development of Displacement Measurement Technologies Based on Grating Interferometry

Displacement Measurement Method Based on Integrated Grating Interferometry with Two-Wavelength Lasers

Compact Grating Displacement Measurement System with a 3 \times 3 Coupler

A Displacement Measuring System Based on Grating Double Diffraction

An ultracompact high-resolution displacement sensor based on self-interference effect of single optical nanograting

Research for Wide Range and High Resolution Displacement Measurement with Grating

Spatially Separated Heterodyne Grating Interferometer for In-Plane and Out-of-Plane Displacement Measurements

Two-dimensional Diagonal-Based Heterodyne Grating Interferometer with Enhanced Signal-to-noise Ratio and Optical Subdivision

Dynamic Tracking Down-Conversion Signal Processing Method Based on Reference Signal for Grating Heterodyne Interferometer

A Displacement Measurement System, Utilizing a Wollaston Interferometer

Displacement Measuring Grating Interferometer: a Review

A Fiber-Based Chromatic Dispersion Probe for Simultaneous Measurement of Dual-Axis Absolute and Relative Displacement

High-precision Microdisplacement Sensor Based on Zeroth-Order Diffraction Using a Single-Layer Optical Grating.