Wet-Cleaning of Contaminants on the Surface of Multilayer Dielectric Pulse Compressor Gratings by the Piranha Solution

Shangbi Chen,Bin Sheng,Xiangdong Xu,Shaojun Fu
DOI: https://doi.org/10.1117/12.866204
2010-01-01
Abstract:Contaminants are deemed to be the initial source of optical-damage mechanisms as well as the main reason to decrease the Laser Induced Damage Threshold (LIDT) of multilayer dielectric pulse compressor gratings (PCG). In this paper, the Piranha solution was used effectively and nondestructively to remove the residual contaminants on the surface of PCG. The surface cleanliness was evaluated by Scanning Electron Microscopy (SEM) and X-ray Photoelectron Spectroscopy (XPS). The higher removal efficiency was achieved with more times of multiple-cleaning by fresh Piranha solution which has an effectiveness for a given period of time.
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