Theoretical study on the bilayer buckling technique for thin film metrology

Fei Jia,XiuPeng Zheng,Yanping Cao,Xiqiao Feng
DOI: https://doi.org/10.3970/cmc.2010.018.105
2010-01-01
Abstract:Recently, a novel technique based on the wrinkling of a bilayer composite film resting on a compliant substrate was proposed to measure the elastic moduli of thin films. In this paper, this technique is studied via theoretical analysis and finite element simulations. We find that under an applied compressive strain, the composite system may exhibit various buckling modes, depending upon the applied compressive strain, geometric and material parameters of the system. The physical mechanisms underlying the occurrence of the two most typical buckling modes are analyzed from the viewpoint of energy. When the intermediate layer is much thicker than the top layer, the condition under which the bilayer buckling will occur prior to other modes is given. The results reported here may facilitate the design of the bilayer buckling technique for the thin film metrology.
What problem does this paper attempt to address?