Effect of surface component and morphology of diamond film on surface energy

HE Kun,Li Gou,Junguo G. Ran
DOI: https://doi.org/10.14062/j.issn.0454-5648.2010.02.027
2010-01-01
Abstract:Diamond films with (100) or (111) plane were grown by the microwave plasma chemical vapor deposition method. The contact angle between liquid and diamond film, surface roughness and resistivity of diamond films were measured. The influence of surface component and morphology of the diamond film on the surface energy were investigated by X-ray diffraction, scanning electron microscope and X-ray photoelectron spectroscopy. The results show that the characteristics of the lower content of non-diamond phase carbon, the larger surface roughness and the smaller grain size lead to a higher surface energy of diamond films. After the air plasma treatment for a short time, the as-grown diamond film presents excellent hydrophilicity and high purity. However, the hydrophilicity of the film is gradually weakened with increasing of time in air. Compared with H 2 plasma post-treatment, the O 2-plasma treated diamond film has stronger hydrophilicity in air after keeping the same time.
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