Abstract:Wall shear stress and flow direction provide a basis for analyzing the boundary layer conditions, investigating drag reduction mechanisms, and enhancing environmental perception. This work presents novel single-loop and dual-loop hot-film sensors driven by the constant temperature (CT), which are capable of simultaneously measuring wall shear stress and flow direction. Based on the heat transfer and fluid dynamics theory, a mathematical model is developed to analyze the flow directions. The sensors feature multilayer structures, where the numerous leads are concealed and embedded in the insulation layer to enhance their robustness and integration. Utilizing the microelectromechanical system technology, sensor prototypes with single-loop and double-loop are fabricated. In particular, a new process method for accomplishing junction holes in the polyimide (PI) insulation layer is proposed. The sidewall-to-bottom angle of junction holes fabricated through wet etching is ~29.4°. After metal lays are deposited in the junction holes, the upper and bottom surfaces of the insulation layer are able to conduct electricity. Moreover, a testing system consisting of a microchannel and a turbulence generator is established to carry out the experimental verification. Then, the hot-film sensors are tested in the microchannel with a maximum Reynolds number of Red = 8600. Low-frequency turbulence as well as natural transition signals are detected by the hot-film sensors successfully. In the range of wall shear stress from 0 to 14.2 Pa, the accuracies of the dual-loop and single-loop hot-film sensors in perceiving flow directions are better than ±3° and ±6.5°, respectively. This work assists to analyze the boundary layer states, to investigate drag reduction mechanisms, and to enhance environmental perception in flow field.

Study on new gas flow sensor based on hot-film probe

Development of a Gas Flow Sensor Based on FS5 Hot-Film Probe

Thermal Gas Flow Measurement Based on Single Sensor

A New Method for Flow Rate Measurement in Millimeter-Scale Pipes.

Non-Silicon MEMS Calorimetric Gas Flow Sensor

Temperature-compensated fiber-optic gas flow speed sensor based on the ‘Hot-wire’ principle

A Model-Based Transit-Time Ultrasonic Gas Flowrate Measurement Method

A numerical investigation of conjugate forced heat transfer for a micro thermal flow sensor

Design of Thermal Liquid Flow Microsensor

Thermal Conductivity Gas Sensor with Enhanced Flow-Rate Independence

A novel thermal senor for gas flowmeter measuring

Development of Low Velocity Gas Flow Sensor

Investigation on the Effective Measures for Improving the Performance of Calorimetric Microflow Sensor

MEMS Flow Sensors Based on Self-Heated aGe-Thermistors in a Wheatstone Bridge

The Gas Mass Flow Measurement Base on Multi-Sensor Information Fusion

Thermal airflow sensor design and temperature compensation research based on the thermostatic method

Theoretical Calibration and Experimental Test of Hemispherical Seven-Hole Probe Under 3-D Flow Field in Wind Tunnel

Flow-Independent Thermal Conductivity and Volumetric Heat Capacity Measurement of Pure Gases and Binary Gas Mixtures Using a Single Heated Wire

Conductance Sensor With Self-Calibration and Venturi Tube Based Flowrate Measurement for Gas–Water Slug Flow

A Small Probe-Type Flowmeter Based on the Differential Fiber Bragg Grating Measurement Method

Constant Temperature Hot-Film Sensor for the Measurement of Near-Wall Turbulence and Flow Direction